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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 3, 2009, Pages 521-530

Influence of deposition pressure and pulsed dc sputtering on pumping properties of Ti-Zr-V nonevaporable getter films

(7) Malyshev, O B a Valizadeh, R b Colligon, J S b Hannah, A a Middleman, K J a Patel, S a Vishnyakov, V M b

a DARESBURY LABORATORY (United Kingdom)

b MANCHESTER METROPOLITAN UNIVERSITY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATOR VACUUMS; AVERAGE GRAIN SIZES; COLUMNAR STRUCTURES; DEPOSITION CONDITIONS; DEPOSITION PRESSURES; FILM DEPOSITIONS; FILM PROPERTIES; FILM TOPOGRAPHIES; ION ASSISTANCES; LOW PRESSURES; NON-EVAPORABLE GETTERS; ORDER OF MAGNITUDES; PULSED DC SPUTTERING; PUMPING CAPACITIES; PUMPING SPEED; ROUGH SUBSTRATES; SMOOTH SUBSTRATES; SPUTTERING CONDITIONS; STICKING PROBABILITIES; SUBSTRATE MATERIALS; SUBSTRATE SURFACES; WORKING PRESSURES; X-RAY PHOTOELECTRON SPECTROSCOPY STUDIES;

GETTERS; ION BOMBARDMENT; IONS; PUMPS; SURFACE PROPERTIES; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM;

SUBSTRATES;

EID: 65549164428 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3112623 Document Type: Article

Times cited : (44)

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