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Volumn 83, Issue 6, 2009, Pages 976-979
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Test Particle Monte-Carlo modelling of installations for NEG film pumping properties evaluation
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Author keywords
Gas dynamics; NEG coating; NEG film; Non evaporable getter (NEG); Test Particle Monte Carlo
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Indexed keywords
DYNAMICS;
GAGES;
GAS DYNAMICS;
KINETIC THEORY;
MONTE CARLO METHODS;
PUMPS;
TESTING;
VACUUM;
GAS INJECTIONS;
NEG COATING;
NEG FILM;
NON-EVAPORABLE GETTER (NEG);
PRESSURE READINGS;
TEST PARTICLE MONTE-CARLO;
GETTERS;
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EID: 58749112343
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2008.11.008 Document Type: Article |
Times cited : (18)
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References (4)
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