Gas adsorption performance of organic thin films prepared by plasma-assisted vacuum evaporation with polyimide precursors

Sensors and Materials

Volumn 22, Issue 7, 2010, Pages 347-356

  Iwamori, Satoru ^a,b   Sugimoto, Ryousuke ^a   Osada, Kousuke ^a   Kurata, Masahiko ^a   Matsumoto, Hiroyuki ^a,c   Noda, Kazutoshi ^d  

^a KANAZAWA UNIVERSITY   (Japan)

^b TOKAI UNIVERSITY   (Japan)

^c Iwasaki Electric Co Ltd   (Japan)

^d NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Plasma; Polyimide; Quartz crystal microbalance; Vacuum evaporation

Indexed keywords

ADSORBED GAS; ADSORPTION PERFORMANCE; ADSORPTION PROPERTIES; ARGON PLASMAS; GAS SENSORS; METHYL SALICYLATE; ORGANIC THIN FILMS; OXYDIANILINE; POLYIMIDE PRECURSORS; POLYIMIDE THIN FILMS; PYROMELLITIC DIANHYDRIDE; QUARTZ CRYSTAL;

ACETALDEHYDE; ACETONE; ARGON; EVAPORATION; GAS ADSORPTION; GASES; INFORMATION DISSEMINATION; MOLECULES; PHASE TRANSITIONS; PIEZOELECTRIC DEVICES; PLASMAS; POLYIMIDES; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; THIN FILMS; TOLUENE; VACUUM; VACUUM TECHNOLOGY; VOLATILE ORGANIC COMPOUNDS;

VACUUM EVAPORATION;

EID: 78149251851     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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