Structure analyses of organic thin films prepared by a plasma enhanced vacuum evaporation

Journal of the Vacuum Society of Japan

Volumn 53, Issue 3, 2010, Pages 176-180

  Sugimoto, Ryousuke ^a   Osada, Kousuke ^a   Kurata, Masahiko ^a   Matsumoto, Hiroyuki ^a,b   Iwamori, Satoru ^a   Noda, Kazutoshi ^c  

^a KANAZAWA UNIVERSITY   (Japan)

^b Iwasaki Electric Co Ltd   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON PLASMAS; HYDROPHILIC MOIETIES; HYDROPHILIC SURFACES; ORGANIC THIN FILMS; OXYDIANILINE; OXYGEN CONTENT; POLYAMIC ACIDS; PYROMELLITIC DIANHYDRIDE; STRUCTURE ANALYSIS;

ARGON; HYDROPHILICITY; OXYGEN; PLASMA DEPOSITION; PLASMAS; POLYIMIDES; SURFACE PROPERTIES; SURFACE ROUGHNESS; THIN FILMS; VACUUM; VACUUM EVAPORATION; VAPOR DEPOSITION;

FILM PREPARATION;

EID: 77953582989     PISSN: 18822398     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj2.53.176     Document Type: Article

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