A general procedure for process yield with multiple characteristics

IEEE Transactions on Semiconductor Manufacturing

Volumn 23, Issue 4, 2010, Pages 503-508

  Wang, Fu Kwun ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Lower confidence bound; multiple characteristics; process yield

Indexed keywords

LOWER CONFIDENCE BOUND; MULTIPLE CHARACTERISTICS; MULTIVARIATE NORMAL DISTRIBUTIONS; NON-NORMAL DISTRIBUTION; PROCESS YIELD; PROCESS YIELD INDEX; SEMICONDUCTOR MANUFACTURING PROCESS;

NORMAL DISTRIBUTION;

EID: 78149251243     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2010.2057264     Document Type: Article

References (24)

1. S. Kotz and N. L. Johnson, "Process capability indices: A review, 1992-2000," J. Quality Technol., vol. 34, no. 1, pp. 2-19, Jan. 2002.
2. C. W. Wu, W. L. Pearn, and S. Kotz, "An overview of theory and practice on process capability indices for quality assurance," Int. J. Prod. Econ., vol. 117, no. 2, pp. 338-359, Mar. 2009.
3. R. A. Boyles, "The Taguchi capability index," J. Quality Technol., vol. 23, no. 1, pp. 17-26, Jan. 1991.
4. L. K. Chan, S. W. Cheng, and F. A. Spiring, "A multivariate measure of process capability," J. Modeling Simul., vol. 11, no. 1, pp. 1-6, Jan. 1991.
5. W. L. Pearn, S. Kotz, and N. L. Johnson, "Distributional and inferential properties of process capability indices," J. Quality Technol. Vol. 24, no. 3, pp. 216-231. Jul. 1992.
6. W. Taam, P. Subbaiah, and J. W. Liddy, "A note on multivariate capability indices," J. Appl. Statist., vol. 20, no. 3, pp. 339-351, May 1993.
7. H. Chen, "A multivariate process capability index over a rectangular solid tolerance zone," Statist. Sin., vol. 4, no. 2, pp. 749-758, Jul. 1994.
8. H. Shahriari, N. F. Hubele, and F. P. Lawrence, "A multivariate process capability vector," in Proc. 4th Ind. Eng. Res. Conf., 1995, pp. 304-309.
9. F. K. Wang, N. F. Hubele, F. P. Lawrence, J. D. Miskulin, and H. Shahriari, "Comparison of three multivariate process capability indices," J. Quality Technol., vol. 32, no. 3, pp. 263-275, Jul. 2000.
10. F. K. Wang and T. C. T. Du, "Using principal component analysis in process performance for multivariate data," Omega, Int. J. Manage. Sci., vol. 28, no. 2, pp. 185-194, Apr. 2000.
11. I. Gonzalez and I. Sanchez, "Capability indices and nonconforming proportion in univariate and multivariate processes," Int. J. Adv. Manuf. Technol., vol. 44, nos. 9-10, pp. 1036-1050, Oct. 2009.
12. J. N. Pan and C. Y. Lee, "New capability indices for evaluating the performance of multivariate manufacturing processes," Quality Reliab. Eng. Int., vol. 26, no. 1, pp. 3-15, Feb. 2010.
13. K. S. Chen, W. L. Pearn, and P. C. Lin, "Capability measures for processes with multiple characteristics," Quality Reliab. Eng. Int., vol. 19, no. 2, pp. 101-110, Mar. 2003.
14. W. L. Pearn, H. Y. Kang, A. H. I. Lee, and M. Y. Liao, "Photolithography control in wafer fabrication based on process capability indices with multiple characteristics," IEEE Trans. Semiconductor Manuf., vol. 22, no. 3, pp. 351-356, Aug. 2009.
15. W. L. Pearn, F. K. Wang, and C. H. Yen, "Measuring production yield for process with multiple quality characteristics," Int. J. Prod. Res., vol. 44, no. 21, pp. 4649-4661, Nov. 2006.
16. F. K. Wang, "Quality evaluation of a manufactured product with multiple characteristics," Quality Reliab. Eng. Int., vol. 22, no. 2, pp. 225-236, Mar. 2006.
17. A. Luceño, "A process capability index with reliable confidence intervals," Commun. Statist. Simul. Comput., vol. 25, no. 1, pp. 235-245, Jan. 1996.
18. C. W. Wu and W. L. Pearn, "Measuring manufacturing capability for couplers and wavelength division multiplexers," Int. J. Adv. Manuf. Technol., vol. 25, nos. 5-6, pp. 533-541, Mar. 2005.
19. Y. C. Hsu, W. L. Pearn, and Y. F. Chuang, "Sample size determination for production yield estimation with multiple independent process characteristics," Eur. J. Oper. Res., vol. 196, no. 3, pp. 968-978, Aug. 2009.
20. pk," Quality Reliab. Eng. Int., vol. 18, no. 2, pp. 111-116, Mar. 2002.
21. J. E. Jackson, "Principal component and factor analysis. Part I: Principal components," J. Quality Technol., vol. 12, no. 2, pp. 201-213, Apr. 1980.
22. G. E. P. Box and D. R. Cox, "An analysis of transformations," J. Royal Stat. Soc. Series B (Stat. Methodol.), vol. 26, no. 1, pp. 221-252, Jan. 1964.
23. K. V. Mardia, "Tests for univariate and multivariate normality," in Handbook of Statistics. New York: North-Holland, 1980, pp. 279-320.
24. IMSL Stat Library, Version 4.0, Microsoft Fortran Power Station, Houston, TX, 1995.