Capacitive micromachined ultrasonic transducer based integrated actuator for atomic force microscope cantilevers

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2002-January, Issue , 2002, Pages 45-49

  Haeggstrom E ^a   Yaralioglu, G G ^a   Ergun, A S ^a   Khuri Yakub, P T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Actuators; Atomic force microscopy; Atomic measurements; DC generators; Length measurement; Piezoelectric films; Structural beams; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; DC GENERATORS; NANOCANTILEVERS; NANOTECHNOLOGY; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; PLATES (STRUCTURAL COMPONENTS); PRESSURE; SURFACE TREATMENT; TRANSDUCERS; ULTRASONIC IMAGING;

ATOMIC FORCE MICROSCOPE CANTILEVERS; ATOMIC MEASUREMENTS; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; LENGTH MEASUREMENT; PARALLEL CANTILEVERS; PIEZOELECTRIC FILM; STRUCTURAL BEAMS; TECHNOLOGY SOLUTIONS;

ULTRASONIC TRANSDUCERS;

EID: 78049527397     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2002.1032120     Document Type: Conference Paper

References (12)

1. G. Binnig, C. F. Quate, and Ch. Gerber, "Atomic force microscope," Phys. Rev. Lett., vol. 56, no. 9, pp. 930-933, 1986.
2. S. Akamine, T. R. Albrecht, M. J. Zdeblick, and C. F. Quate, "Microfabricated scanning tunneling microscope," IEEE Electron Device Lett., vol. 10, no. 11, pp. 490-495, November 1989.
3. T. Fujii. S. Watanabe, M. Suzuki, and T. Fujiu, "Application of lead zirconate titanate thin film displacement sensors for the atomic force microscopy," J. Vac. Sci. Technol B, vol. 13, no. 3, pp. 1119-1122, May 1995.
4. S. R. Manalis, S. C. Minne, and C. F. Quate, "Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor," Appl. Phys. Lett., vol. 68, no. 6, pp. 871-873, February 1996.
5. S. C. Minne, G. Yaralioglu, S. R. Manalis, J. D. Adams, J. Zesch, A. Atalar, and C. F. Quate, "Automated parallel high-speed atomic force microscopy," Appl. Phys. Lett., vol. 72, no. 18, pp. 2340-2342, May 1998.
6. F. L. Degertekin, B. Hadimioglu, T. Sulchek, and C. F. Quate, "Actuation and characterization of atomic force microscope cantilevers in fluids by acoustic radiation pressure," Appl. Phys. Lett., vol. 78, no. 11, pp. 1628-1630, March 2001.
7. S. A. Elrod, B. Hadimioglu, B. T. Khuri-Yakub, E. G. Rawson, E. Richley, C. F. Quate, N. N. Mansour, and T. S. Lundgren, "Nozzless droplet formation by using focused acoustic beams," J. Appl.Phys., vol 65, no.9, pp. 3441-3447, May 2001.
8. J. Lighthill, "Acoustic Streaming", J. Sound and Vibr., vol. 61, no. 3, pp. 391-418, 1978.
9. th ed", McGraw-Hill Book Company, NY, 1978.
10. S.T. Hansen, A. Turo, F.L. Degertekin, and B. T. Khuri-Yakub, "Characterization of Capacitive Micromachined Ultrasonic Transducers in Air Using Optical Measurements", 2000 IEEE Ultrasonics Symposium, pp. 947-950.
11. X. Jin, O. Oralkan, F.L. Degertekin, and B. T. Khuri-Yakub, "Characterization of One-Dimensional Capacitive Micromachined Ultrasonic Transducer Arrays", IEEE Trans. Ultrason.Ferroel and Freq. Contr., vol 48, no.3, pp. 750-757, May 2001.
12. X. Jin, I. Ladabaum, B.T. Khuri-Yakub, "The Fabrication of Capacitive Ultrasonic Transducers", J. Micromechanical systems., vol. 7, no. 3, pp. 295-301, 1998.