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Volumn 7640, Issue , 2010, Pages

Novel continuously shaped diffractive optical elements enable high efficiency beam shaping

Author keywords

beam shaping; diffractive beam splitters; diffractive continuous microrelief; diffractive optical elements (DOE); free form surfaces; homogeneity; microoptics array

Indexed keywords

DENSITY (OPTICAL); DIFFRACTIVE OPTICAL ELEMENTS; EFFICIENCY; LITHOGRAPHY; MANUFACTURE; MICROLENSES; OPTICAL COMMUNICATION; OPTICAL INSTRUMENTS; PRISMS; SURFACE MORPHOLOGY;

EID: 78049388974     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.846573     Document Type: Conference Paper
Times cited : (45)

References (11)
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    • Novel high-throughput micro-optical beam shapers reduce the complexity of macro-optics in hyper-NA illumination systems
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    • (2007) Proc. SPIE , vol.6520
    • Bizjak, T.1    Mitra, T.2    Aschke, L.3
  • 2
    • 45449088897 scopus 로고    scopus 로고
    • Novel refractive optics enable multipole off-axis illumination
    • Bizjak, T., Mitra, T., Hauschild, D., Aschke, L., "Novel refractive optics enable multipole off-axis illumination", Proc. SPIE 6924, (2008)
    • (2008) Proc. SPIE , vol.6924
    • Bizjak, T.1    Mitra, T.2    Hauschild, D.3    Aschke, L.4
  • 3
    • 79551695588 scopus 로고    scopus 로고
    • Refractive beam shaping: From the solution of the Maxwell equations to products and its applications in laser material processing
    • Homburg, O., Hauschild, D., Aschke, L., Lissotschenko, V., .,Refractive beam shaping: From the solution of the Maxwell equations to products and its applications in laser material processing", Proc. SPIE (2008)
    • (2008) Proc. SPIE
    • Homburg, O.1    Hauschild, D.2    Aschke, L.3    Lissotschenko, V.4
  • 5
    • 66649121991 scopus 로고    scopus 로고
    • Inspection and metrology tools benefit from free-form refractive micro-lens and micro-lens arrays
    • Bizjak, T., Mitra, T., Hauschild D., Aschke, L., "Inspection and metrology tools benefit from free-form refractive micro-lens and micro-lens arrays", Proc. SPIE 7272 (2009)
    • (2009) Proc. SPIE , vol.7272
    • Bizjak, T.1    Mitra, T.2    Hauschild, D.3    Aschke, L.4
  • 9
    • 30844447240 scopus 로고
    • Diffractive optical elements: Iterative calculation of quantized, blazed phase structures
    • Wyrowski, F., "Diffractive optical elements: iterative calculation of quantized, blazed phase structures", J. Opt. Soc. Am. A, v. 7, no. 6, 961-963 (1990)
    • (1990) J. Opt. Soc. Am. A , vol.7 , Issue.6 , pp. 961-963
    • Wyrowski, F.1
  • 11
    • 38849130669 scopus 로고    scopus 로고
    • Theory of optimal beam splitting by phase gratings. I. One-dimensional gratings
    • Romero, L.A., Dickey, F. M., "Theory of optimal beam splitting by phase gratings. I. One-dimensional gratings", JOSA A, Vol. 24, Issue 8, 2280-2295.
    • JOSA A , vol.24 , Issue.8 , pp. 2280-2280
    • Romero, L.A.1    Dickey, F.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.