Inspection and metrology tools benefit from free form refractive micro-lens and micro-lens arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7272, Issue , 2009, Pages

  Bizjak, Tanja ^a   Mitra, Thomas ^a   Aschke, Lutz ^a  

^a LIMO Lissotschenko Mikrooptik GmbH   (Germany)

Author keywords

Beam shaping; Calcium fluoride; Cylindrical micro lens arrays; Durability; Free form surface; Fused silica; High homogeneity; Mask and wafer inspection; Metrology; Tilted illumination

Indexed keywords

BEAM SHAPING; CYLINDRICAL MICRO-LENS ARRAYS; FREE FORM SURFACE; HIGH HOMOGENEITY; METROLOGY; TILTED ILLUMINATION;

ALIGNMENT; CALCIUM; CALCIUM ALLOYS; CALCIUM FLUORIDE; COMPUTER AIDED DESIGN; DURABILITY; FLUORSPAR; INSPECTION; MANUFACTURE; MEASUREMENTS; MICROLENSES; OPTICAL INSTRUMENTS; PROCESS CONTROL; SENSORS; SILICA; WAFER BONDING;

FUSED SILICA;

EID: 66649121991     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814264     Document Type: Conference Paper

References (5)

1. H. J. Levinson, Principles of Lithography, SPIE Press, 133, 2001
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4. Brown, D.M., Dickey, F.M., Weichmann, L.S., "Multi-aperture Beam Integration Systems", [Laser Beam Shaping, Theory and Techniques], Dickey, F.M., Holswade, S.C. (ed), 273-311 (2000)
5. Bizjak, T., Mitra, T., Hauschild, D., Aschke, L., "Novel refractive optics enable multipole off-axis illumination", Proc. SPIE 6924, (2008)