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Applied Physics A: Materials Science and Processing

Volumn 101, Issue 2, 2010, Pages 271-278

Femtosecond laser drilling of alumina ceramic substrates

(8) Wang, X C a Zheng, H Y a Chu, P L a Tan, J L a Teh, K M a Liu, T a Ang, Bryden C Y b Tay, G H b

a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY (Singapore)

b DSO NATIONAL LABORATORIES (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA CERAMIC SUBSTRATES; ALUMINA SUBSTRATES; DRILLED HOLES; ELECTRONIC DEVICE; FEMTO-SECOND LASER; FOCUS POSITIONS; HIGH QUALITY; LASER PARAMETERS; OPTICAL MICROSCOPES; POTENTIAL APPLICATIONS; SEM/EDX; SURFACE FINISHES; TRAVERSE SPEED;

CERAMIC MATERIALS; DEBRIS; HEAT AFFECTED ZONE; PULSED LASER APPLICATIONS; ULTRASHORT PULSES;

SUBSTRATES;

EID: 78049349213 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-010-5816-8 Document Type: Article

Times cited : (67)

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