Scanning tunneling microscopy study of in situ hydrogenation of Si(110) surface

Japanese Journal of Applied Physics

Volumn 49, Issue 8 PART 4, 2010, Pages

  Visikovskiy, Anton ^a,b   Yoshimura, Masamichi ^a   Ueda, Kazuyuki ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC HYDROGEN; CHEMICAL METHOD; HIGHER TEMPERATURES; IN-SITU HYDROGENATION; SATURATION COVERAGE; SI(110);

HYDROGENATION; SCANNING TUNNELING MICROSCOPY; SILICON;

SURFACE STRUCTURE;

EID: 78049340715     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.08LB05     Document Type: Conference Paper

References (22)

1. P. Gaubert, A. Teramoto, and K. Kotani: IEEE Trans. Electron Devices 53 (2006) 851.
2. W. Cheng, A. Teramoto, M. Hirayama, S. Sugawa, and T. Ohmi: Jpn. J. Appl. Phys. 45 (2006) 3110.
3. T. Sato, Y. Takeishi, H. Hara, and Y. Okamoto: Phys. Rev. B 4 (1971) 1950.
4. A. Teramoto, T. Hamada, M. Yamamoto, P. Gaubert, H. Akahori, K. Nii, M. Hirayama, K. Arima, K. Endo, and S. Sugawa: IEEE Trans. Electron Devices 54 (2007) 1438.
5. A. Visikovskiy, M. Yoshimura, and K. Ueda: Jpn. J. Appl. Phys. 48 (2009) 08JB11.
6. T. Hirao, T. Kamada, M. Kitagawa, K. Setsune, K. Wasa, A. Matsuda, and K. Tanaka: Jpn. J. Appl. Phys. 27 (1988) 528.
7. A. Sakai and T. Tatsumi: Appl. Phys. Lett. 64 (1994) 52.
8. K. Ueda, T. Ushirosako, and M. Yoshimura: Thin Solid Films 343-344 (1999) 612.
9. C. Grupp and A. Taleb-Ibrahimi: Surf. Sci. 433-435 (1999) 585.
10. J. Boland: Phys. Rev. Lett. 65 (1990) 3325.
11. J. Northrup: Phys. Rev. B 44 (1991) 1419.
12. A. Kraus, M. Hanbücken, T. Koshikawa, and H. Neddermeyer: Anal. Bioanal. Chem. 374 (2002) 688.
13. G. Schultze and M. Henzler: Surf. Sci. 124 (1983) 336.
14. K. Arima, J. Katoh, and K. Endo: Appl. Phys. Lett. 85 (2004) 6254.
15. S. Horie, K. Arima, K. Hirose, J. Katoh, T. Ono, and K. Endo: Phys. Rev. B 72 (2005) 113306.
16. T. An, M. Yoshimura, I. Ono, and K. Ueda: Phys. Rev. B 61 (2000) 3006.
17. M. Yoshimura, M. Odawara, and K. Ueda: Mater. Sci. Eng. B 91-92 (2002) 120.
18. M. Yoshimura, T. An, I. Ono, and K. Ueda: Surf. Sci. 433-435 (1999) 470.
19. T. Ichinokawa, H. Ampo, S. Miura, and A. Tamura: Phys. Rev. B 31 (1985) 5183.
20. A. Shrebtii, C. Bertoni, R. D. Sole, and B. Nesterenko: Surf. Sci. 239 (1990) 227.
21. A. Dinger, C. Lutterloh, and J. Küppers: Surf. Sci. 482 (2001) 227.
22. A. Khan, Y. Narita, A. Namiki, A. Kato, and M. Suemitsu: Surf. Sci. 602 (2008) 1979.