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Volumn 88, Issue 1, 2011, Pages 60-63
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Replication of 3D-microstructures with undercuts by UV-moulding
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Author keywords
3D structures; Microdevice; Microfabrication; Replication; Undercuts; UV curing; UV moulding
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Indexed keywords
3D-STRUCTURES;
MICRO DEVICES;
REPLICATION;
UNDERCUTS;
UV-CURING;
UV-MOULDING;
CURING;
DEFECTS;
MICROANALYSIS;
MICROFABRICATION;
MICROMACHINING;
MICROSTRUCTURE;
PORTABLE EQUIPMENT;
THREE DIMENSIONAL;
MOLDING;
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EID: 77958603484
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2010.08.021 Document Type: Article |
Times cited : (14)
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References (11)
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