Large scale molecular dynamics simulations of vapor phase lubrication for MEMS

Journal of Adhesion Science and Technology

Volumn 24, Issue 15-16, 2010, Pages 2453-2469

  Lorenz, Christian D ^a   Chandross, Michael ^b   Grest, Gary S ^b  

^a KING'S COLLEGE LONDON   (United Kingdom)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

AFM; MEMS; Molecular dynamics simulations; nanotribology; vapor phase lubrication

Indexed keywords

AFM; AFM TIP; ALCOHOL MOLECULES; ALKYLSILANE MONOLAYERS; AMORPHOUS SILICA; ASPERITY CONTACTS; CONTACT REGIONS; LARGE-SCALE MOLECULAR DYNAMICS; LOW LOAD; LOW VAPOR PRESSURES; MOLECULAR DYNAMICS SIMULATIONS; POTENTIAL SOLUTIONS; REDUCING-FRICTION; SILICA SURFACE; UNDERLYING MECHANISM; VAPOR PHASE; VAPOR PHASE LUBRICATION;

ATOMIC FORCE MICROSCOPY; ELECTRON ENERGY LEVELS; FRICTION; LUBRICATION; MONOLAYERS; NANOTRIBOLOGY; ORGANIC POLYMERS; SILICA; SUBSTRATES; VAPOR PHASE EPITAXY; VAPORS;

MOLECULAR DYNAMICS;

EID: 77958521351     PISSN: 01694243     EISSN: 15685616     Source Type: Journal    
DOI: 10.1163/016942410X508163     Document Type: Article

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