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Electrochemical and Solid-State Letters

Volumn 13, Issue 12, 2010, Pages

Sputtering effect on amorphous Ga-In-Zn-O thin-film surface: Occurrence of subgap and metallic states

(10) Lee, Mi Ji a Kang, Se Jun a Baik, Jae Yoon b Kim, Ki Jeong b Kim, Hyeong Do b Shin, Hyun Joon a,b Chung, Jaegwan c Lee, Eunha c Lee, Jaecheol c Lee, Jaehak c

a Pohang University of Science and Technology (POSTECH) (South Korea)

b POSTECH (South Korea)

c Samsung Advanced Institute of Technology (SAIT) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL STATE; FERMI ENERGY; HIGH RESOLUTION; METALLIC STATE; ORBITALS; SPUTTERING EFFECTS; VALENCE-BAND MAXIMUMS;

NEON; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC;

AMORPHOUS FILMS;

EID: 77958477649 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.3494033 Document Type: Article

Times cited : (10)

References (10)

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