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Volumn 2, Issue , 2007, Pages 1178-1183
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Investigation on μc Si:H material and its TFTs
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Author keywords
Microcrystalline silicon; Recoverable instability; Structural and electrical anisotropy; Thin film transistor
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Indexed keywords
ACTIVE LAYER;
DARK CONDUCTIVITY;
DEGRADATION RATIOS;
DEPOSITION CONDITIONS;
ELECTRICAL ANISOTROPY;
GRAIN SIZE;
GROWTH MODELS;
MATERIAL CHARACTERISTICS;
MATERIAL PERFORMANCE;
RECOVERABLE INSTABILITY;
SILICON CONCENTRATION;
VOLUME RATIO;
ANISOTROPY;
FILM GROWTH;
GRAIN GROWTH;
MICROCRYSTALLINE SILICON;
THIN FILM TRANSISTORS;
THIN FILMS;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 77958070534
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (3)
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References (9)
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