Microstructure evolution of Ti-Si-C-Ag nanocomposite coatings deposited by DC magnetron sputtering

Acta Materialia

Volumn 58, Issue 20, 2010, Pages 6592-6599

  Lauridsen, J ^a   Eklund, P ^a   Jensen, J ^a   Ljungcrantz, H ^b   Oberg A ^c   Lewin, E ^d   Jansson, U ^d   Flink, A ^b   Hogberg H ^b   Hultman, L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b Impact Coatings AB   (Sweden)

^c ABB CORPORATE RESEARCH   (Sweden)

^d UPPSALA UNIVERSITY   (Sweden)

Author keywords

Analytical electron microscopy; Eutectic solidification; Helium ion microscopy; Nanocomposite; X ray photoelectron spectroscopy

Indexed keywords

AG COMPOUNDS; ANALYTICAL ELECTRON MICROSCOPY; COATING THICKNESS; DC MAGNETRON SPUTTERING; EUTECTIC INTERACTIONS; EUTECTIC SOLIDIFICATION; HELIUM ION; HELIUM ION MICROSCOPY; HIGH RATE; MATRIX; MICROSTRUCTURE EVOLUTIONS; NANO-COMPOSITE COATING; SI CONTENT; TARGET COMPOSITION;

AMORPHOUS SILICON; COATINGS; ELECTRON MICROSCOPY; ELECTRONS; EUTECTICS; HELIUM; ION MICROSCOPES; IONS; NANOCOMPOSITES; PHOTOELECTRICITY; PHOTONS; SILICON CARBIDE; SOLIDIFICATION; THICKNESS MEASUREMENT; TITANIUM CARBIDE; X RAY DIFFRACTION; X RAYS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 77958004988     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2010.08.018     Document Type: Article

References (43)

1. B. Feng, D.M. Cao, W.J. Meng, J. Xu, R.C. Tittsworth, and L.E. Rehn Surf Coat Technol 148 2001 153
2. T. Zehnder, J. Matthey, P. Schwaller, A. Klein, P.-A. Steinmann, and J. Patscheider Surf Coat Technol 163 2003 238
3. A.R. Phani, J.E. Krzanowski, and J.J. Nainaparampil J Vac Sci Technol A 19 2001 2252
4. D. Martinez-Martinez, C. Lopez-Cartes, A. Justo, A. Garcia-Luis, M. Brizuela, and J.I. Onate J Vac Sci Technol A 23 2005 1732
5. Y.T. Pei, D. Galvan, J.Th.M. DeHosson, and A. Cavalerio Surf Coat Technol 198 2005 44
6. Jansson U, Lewin E, Rsander M, Eriksson O, André B, Wiklund U. Surf Coat Technol; 2010, doi: 10.1016/j.surfcoat.2010.06.017.
7. P. Eklund, J. Emmerlich, H. Högberg, O. Wilhelmsson, P. Isberg, and J. Birch J Vac Sci Technol B 23 2005 2486
8. P. Eklund, T. Joelsson, H. Ljungcrantz, O. Wilhelmsson, Zs. Czigány, and H. Högberg Surf Coat Technol 201 2007 6465
9. Isberg P, Eklund P, Emmerlich J, Hultman L, Högberg H, Ljungcrantz H. International Patent no. WO2005/038985 A2; 18 October 2004.
10. P. Eklund Surf Eng 23 2007 406
11. E. Lewin, O. Wilhelmsson, and U. Jansson J Appl Phys 100 2006 054303
12. E. Lewin, E. Olsson, B. André, T. Joelsson,. Öberg, and U. Wiklund Plasma Process Polym 6 2009 S928
13. M. Rester, J. Neidhardt, P. Eklund, J. Emmerlich, H. Ljungcrantz, and L. Hultman Mater Sci Eng A 429 2006 90
14. Lauridsen J, Eklund P, Joelsson T, Ljungcrantz H, Öberg, Lewin E, et al. Surf Coat Technol; in press.
15. C.C. Tseng, J.H. Hsieh, S.C. Jang, Y.Y. Chang, and W. Wu Thin Solid Films 517 2009 4970
16. V. Bakumov, K. Gueinzius, C. Hermann, M. Schwarz, and E. Kroke J Eur Ceram Soc 27 2007 3287
17. P.J. Kelly, H. Li, K.A. Whitehead, J. Verran, R.D. Arnell, and I. Iordanova Surf Coat Technol 204 2009 1137
18. Y. Zhang, H.J. Whitlow, T. Winzell, I.F. Bubb, T. Sajavaara, and J. Jokinen Nucl Instrum Methods Phys Res B 149 1999 477
19. Janson MS. CONTES instruction manual; 2004.
20. M.P. Seah Surf Interface Anal 31 2001 721
21. R. Hill, J. Notte, and B. Ward Phys Procedia 1 2008 135
22. B.W. Ward, J.A. Notte, and N.P. Economou J Vac Sci Technol B 24 2006 2871
23. W.C. Oliver, and G.M. Pharr J Mater Res 7 1992 1564
24. D.K. Sarkar, S. Dhara, K.G.M. Nair, and S. Chowdhury Nucl Instrum Meth Phys Res B 168 2000 215
25. S.S. Lau, B. Y Tsaur, M. von Allmen, J.W. Mayer, D. Stritzker, and C.W. White Nucl Instrum Methods 97 1981 182
26. T.B. Massalski, Binary alloy phase diagrams 1986 American Society for Metals Metals Park, Ohio
27. J. Alami, P. Eklund, J. Emmerlich, O. Wilhelmsson, U. Jansson, and H. Högberg Thin Solid Films 515 2006 1731
28. J. Chastain, and R. King Jr. Handbook of X-ray photoelectron spectroscopy, physical electronics 1995 Eden Prarie MN
29. E. Lewin, M. Gorgoi, F. Schäfers, S. Svensson, and U. Jansson Surf Coat Technol 204 2009 455
30. E. Lewin, P.O.. Persson, M. Lattemann, M. Stüber, M. Gorgoi, and A. Sandell Surf Coat Technol 202 2008 3563
31. M. Magnuson, E. Lewin, L. Hultman, and U. Jansson Phys Rev B 80 2009 235108
32. H. Högberg, J. Birch, M. Odén, J.-O. Malm, L. Hultman, and U. Jansson J Mater Res 5 2001 1301
33. H.O. Pierson Handbook of refractory carbides and nitrides 1996 Noyes Publication London
34. I. Petrov, P.B. Barna, L. Hultman, and J.E. Green J Vac Sci Technol A 21 5 2003 117
35. A. Hiraki, E. Lugujjo, M.-A. Nicolet, and J.W. Mayer Phys Status Solidi A 7 1971 401
36. K. Nakamura, J.O. Olowolafe, S.S. Lau, M.A. Nicolet, W.J. Mayer, and R. Shima J Appl Phys 47 1976 1278
37. A.E. Robertsson, L. Hultman, H.T.G. Hentzell, S.-E. Hörnström, G. Shaofang, and P.A. Psaras J Vac Sci Technol A 5 1987 1447
38. U. Kambi, M. von Allmen, N. Saunders, and A.P. Miodownik Appl Phys A A36 1985 189
39. D.A. Poster, and K.E. Easterling Phase transformations in metals and alloys 2004 Taylor and Francis Boca Raton, FL
40. J.M. Poate, K.N. Tu, J.W. Mayer, Thin films-interdiffusion and reactions 1978 Wiley New York 359 406
41. C. Nordling, and J. Österman Physics handbook for science and engineering 2004 Studentlitteratur Lund
42. Y.J. Park, Y.W. Park, and J.S. Chun Thin Solid Films 166 1988 367
43. U. Schürmann, W. Hartung, H. Takele, V. Zaporojtchenko, and F. Faupel Nanotechnology 16 2005 1078