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Volumn 201, Issue 14, 2007, Pages 6465-6469

Microstructure and electrical properties of Ti-Si-C-Ag nanocomposite thin films

Author keywords

Electron microscopy; Resistivity; Silver; Sputtering; Titanium carbide; X ray diffraction

Indexed keywords

COALESCENCE; CRYSTAL MICROSTRUCTURE; CRYSTALLITES; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; NANOCOMPOSITES; STRUCTURAL PROPERTIES; THIN FILMS; TITANIUM CARBIDE;

EID: 33847155133     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.12.016     Document Type: Article
Times cited : (24)

References (26)
  • 16
    • 33847092937 scopus 로고    scopus 로고
    • P. Isberg, P. Eklund, J. Emmerlich, L. Hultman, H. Högberg, H. Ljungcrantz, International Patent no. WO2005/038985 A2 (18 October 2004).
  • 19
    • 33847146708 scopus 로고    scopus 로고
    • National Institute of Standards and Technology X-ray Photoelectron Spectroscopy Database, http://srdata.nist.gov/xps/.
  • 22
    • 0003689862 scopus 로고
    • Massalski T.B. (Ed), American Society for Metals, Metals Park, Ohio
    • In: Massalski T.B. (Ed). Binary Alloy Phase Diagrams (1986), American Society for Metals, Metals Park, Ohio
    • (1986) Binary Alloy Phase Diagrams


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.