SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7545, Issue , 2010, Pages

Defect inspection with an EUV microscope

(5) Herbert, Stefan a Maryasov, Aleksey a Juschkin, Larissa a Lebert, Rainer b Bergmann, Klaus c

a RWTH AACHEN UNIVERSITY (Germany)

b Bruker Advanced Supercon GmbH (Germany)

c FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY (Germany)

Author keywords

Actinic mask blank inspection; EUV defects; EUV microscopy; Metrology

Indexed keywords

ATOMIC FORCE MICROSCOPES; DARK FIELD; DEFECT DETECTION; DEFECT INSPECTION; DISCHARGE-PRODUCED PLASMAS; EUV DEFECTS; EUV MICROSCOPE; EUV MICROSCOPY; LARGE FIELD OF VIEWS; MASK BLANK; MASK BLANK INSPECTION; METROLOGY; MULTI-LAYER MIRRORS; NATURAL DEFECT; PHOTON FLUX; SCHWARZSCHILD OBJECTIVE; TABLE-TOP; TEST STRUCTURE;

DEFECTS; MICROSCOPES; OPTICAL TESTING;

INSPECTION;

EID: 77957904636 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.863818 Document Type: Conference Paper

Times cited : (10)

References (8)

1
- 73349121340
- EUV microscopy for defect inspection by dark-field mapping and zone plate zooming
- L. Juschkin, R. Freiberger, K. Bergmann, EUV microscopy for defect inspection by dark-field mapping and zone plate zooming, Journal of Physics: Conference Series 186, 012030, (2009).
- (2009) Journal of Physics: Conference Series , vol.186 , pp. 012030
- Juschkin, L.¹ Freiberger, R.² Bergmann, K.³

2
- 69949125142
- Two magnification steps EUV microscopy with a Schwarzschild objective and an adapted zone plate lens, EUV and X-Ray Optics: Synergy between Laboratory and Space
- L. Juschkin, R. Freiberger, Two magnification steps EUV microscopy with a Schwarzschild objective and an adapted zone plate lens, EUV and X-Ray Optics: Synergy between Laboratory and Space, Proceedings of the SPIE, Volume 7360, 736005, (2009).
- (2009) Proceedings of the SPIE , vol.7360 , pp. 736005
- Juschkin, L.¹ Freiberger, R.²

3
- 77957917905
- PhD Thesis
- K. Walter, Auslegung und Charakterisierung eines Extrem-Ultraviolett- Transmissionsmikroskops, PhD Thesis, (2005).
- (2005) Auslegung und Charakterisierung Eines Extrem-Ultraviolett- Transmissionsmikroskops
- Walter, K.¹

4
- 70249087344
- Actinic mask blank inspection and signal analysis for detection phase defects down to 1.5 nm in height
- T. Terawasa, T. Yamane, T. Tanaka, T. Iwasaki, O. Suga, T. Tomie, Actinic Mask Blank Inspection and Signal Analysis for Detection Phase Defects Down to 1.5 nm in Height, Japanese Journal of Applied Physics 48, 06FA04, (2009).
- (2009) Japanese Journal of Applied Physics , vol.48
- Terawasa, T.¹ Yamane, T.² Tanaka, T.³ Iwasaki, T.⁴ Suga, O.⁵ Tomie, T.⁶

5
- 57249091891
- EUV mask reflectivity measurements with micron-scale spatial resolution
- K. A. Goldberg, S. B. Rekawa, C. D. Kemp, A. Barty, E. Anderson, P. Kearney, H. Han, EUV mask reflectivity measurements with micron-scale spatial resolution, Proc. SPIE 6921, 6921-143, (2008).
- (2008) Proc. SPIE , vol.6921 , pp. 6921-7143
- Goldberg, K.A.¹ Rekawa, S.B.² Kemp, C.D.³ Barty, A.⁴ Anderson, E.⁵ Kearney, P.⁶ Han, H.⁷

6
- 0003920042
- University of California, Berkeley and Lawrence Berkeley National Laboratory
- D. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation, University of California, Berkeley and Lawrence Berkeley National Laboratory, (2000).
- (2000) Soft X-rays and Extreme Ultraviolet Radiation
- Attwood, D.¹

7
- 21444460118
- Wiley & Sons
- C. Bohren, D. Huffman, Absorption and scattering of light by small particles, Wiley & Sons, (1983).
- (1983) Absorption and Scattering of Light by Small Particles
- Bohren, C.¹ Huffman, D.²

8
- 3843091564
- Enhanced model for the efficient 2D and 3D simulation of defective EUV masks
- P. Evanschitzky, A. Erdmann, Enhanced model for the efficient 2D and 3D simulation of defective EUV masks, Proc. SPIE 5374, 0277-786X, (2004).
- (2004) Proc. SPIE , vol.5374
- Evanschitzky, P.¹ Erdmann, A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.