Two magnification steps EUV microscopy with a schwarzschild objective and an adapted zone plate lens

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7360, Issue , 2009, Pages

  Juschkin, Larissa ^a   Freiberger, Ralf ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Actinic inspection; EUV detector; EUV microscopy; EUVL mask; Schwarzschild objective; Zone plate

Indexed keywords

ACTINIC INSPECTION; EUV DETECTOR; EUV MICROSCOPY; EUVL MASK; SCHWARZSCHILD OBJECTIVE; ZONE PLATE;

DETECTORS; LAWS AND LEGISLATION; LENSES; LIGHT; MASKS; OPTICAL INSTRUMENTS; OPTICAL SYSTEMS; OPTICS; PLATES (STRUCTURAL COMPONENTS); ULTRAVIOLET DEVICES;

EXTREME ULTRAVIOLET LITHOGRAPHY;

EID: 69949125142     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.822986     Document Type: Conference Paper

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