EUV microscopy for defect inspection by dark-field mapping and zone plate zooming

Journal of Physics: Conference Series

Volumn 186, Issue , 2009, Pages

  Juschkin, Larissa ^a,b   Freiberger, Ralf ^a,b   Bergmann, Klaus ^c  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b JARA Fundamentals of Future Information Technology   (Germany)

^c FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 73349121340     PISSN: 17426588     EISSN: 17426596     Source Type: Journal    
DOI: 10.1088/1742-6596/186/1/012030     Document Type: Conference Paper

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