Characterizing crystalline chromium oxide thin film growth parameters

Reviews on Advanced Materials Science

Volumn 24, Issue 1-2, 2010, Pages 64-68

  Abu Shgair, Khaleel ^a   Abu Safe, Husam H ^b   Aryasomayajula, Aditya ^b   Beake, Ben ^c   Gordon, Matt H ^b  

^a AL BALQA APPLIED UNIVERSITY   (Jordan)

^b UNIVERSITY OF ARKANSAS   (United States)

^c MICRO MATERIALS LTD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM OXIDES; CYLINDRICAL TARGET; DEPOSITED FILMS; ENERGY DISPERSIVE X-RAY SPECTROSCOPY ANALYSIS; ISOFLUX; LOW TEMPERATURES; MID-FREQUENCY; NANOINDENTATION TESTS; OXYGEN PLASMAS; RF MAGNETRONS; SPUTTERING TECHNIQUES; STAINLESS STEEL SUBSTRATES; STEEL SUBSTRATE; SUBSTRATE BIASING;

ARGON; CHROMIUM; CRYSTALLINE MATERIALS; DC POWER TRANSMISSION; HARDNESS; MAGNETRONS; NANOINDENTATION; OXYGEN; PLASMA DEPOSITION; SPUTTER DEPOSITION; STAINLESS STEEL; SUBSTRATES; THIN FILMS; X RAY SPECTROSCOPY;

FILM GROWTH;

EID: 77957261771     PISSN: 16065131     EISSN: 16058127     Source Type: Journal    
DOI: None     Document Type: Article

References (15)

1. [I] P. Jin, G. Xu, M. Tazawa and K. Yoshimura // J. Vac. Sci. Technol. A 20 (2002) 2134.
2. Y. Jin and Y. Yang // Surf. Coat. Technol. 88 (1996) 248.
3. J. Wei and Q. Xue // Wear 199 (1996) 157.
4. S. Chevalier, G. Bonnet and J. P. Larpin // Oxidation of Metals 47 (1997) 53.
5. K. C. Walter, J. T. Scheuer and P. Kodali // Surf. Coat. Technol. 85 (1996) 1.
6. A. S. Khao and M. F. Doerner // J. Appl. Phys. 66 (1989) 5315.
7. B. Bhushan // Thin Solid Films 64 (1979) 231.
8. J. Trube, H. Yabe, S. Aya, K. Marumoto and Y. Matsui // J. Vac. Sci. Technol. B 11 (1993) 2990.
9. G. Conoux, F. Cosset and A. Celerier // J. Machet Thin Solid Films 292 (1997) 75.
10. P. Hones, M. Diserens and F. Levy // Surf. Coat. Technol. 120 (1999) 277.
11. A. N. Cloud, A. Aryasomayajula, D. G. Bhat and M. H. Gordon // Surf. Coat. Technol. 202 (2007) 1564.
12. A. Khanna, D.G. Bhat and E. A. Payzant // J. Vac. Sci. Technol A. 24 (2006) 1870.
13. Da-Yung Wang, Jian-Hong Lin and Wei-Yu Ho // Thin solid films 332 (1998) 295.
14. Adibi, I. Petrov, J. E. Greene, L. Hultman and J. E. Sundgren // J. Appl. Phys. 73 (1993) 8580.
15. J. M. Schneider, W. D. Sproul, J. Sellers and A. Matthews, In: Soc. Of Vac. Coaters, 40th Annual Technical Conference Proceedings (Society of Vacuum Coaters, 1997), p. 301.