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Volumn 507, Issue 2, 2010, Pages
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Effect of phase transformation on structural, electrical and hydrophobic properties of nanocomposite Ti1-xAlxN films
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Author keywords
Contact angle; Microstructural characterization; Nanocomposite films; Resistivity; Sputtering
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Indexed keywords
ALUMINUM;
ALUMINUM NITRIDE;
CONTACT ANGLE;
CRYSTALLITE SIZE;
ELECTRIC CONDUCTIVITY;
HYDROPHOBICITY;
III-V SEMICONDUCTORS;
LINEAR TRANSFORMATIONS;
MATHEMATICAL TRANSFORMATIONS;
NANOCOMPOSITE FILMS;
NANOCOMPOSITES;
PHASE TRANSITIONS;
SODIUM CHLORIDE;
SPUTTERING;
STRUCTURAL ANALYSIS;
SUBSTRATES;
TITANIUM COMPOUNDS;
ZINC SULFIDE;
CHARACTERIZATION TECHNIQUES;
DROP SHAPE ANALYSIS;
FLOWER-LIKE STRUCTURES;
FOUR-PROBE METHODS;
HYDROPHOBIC PROPERTIES;
MICRO-STRUCTURAL CHARACTERIZATION;
ROOT MEAN SQUARE ROUGHNESS;
STRUCTURAL FEATURE;
BORON COMPOUNDS;
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EID: 77957141360
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2010.08.017 Document Type: Letter |
Times cited : (13)
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References (31)
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