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Volumn , Issue , 2009, Pages
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Study on optimization of capacitive pressure sensor using coupled Mechanical-Electric analysis
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITIVE PRESSURE SENSORS;
COMMON PROJECTS;
COUPLED FIELD ANALYSIS;
ELECTRICAL FIELD;
FINITE ELEMENT SIMULATIONS;
FOIL THICKNESS;
GEOMETRICAL PARAMETERS;
MECHANICAL DEFLECTION;
OUTPUT CHARACTERISTICS;
PACKAGING METHODS;
SENSOR DESIGNS;
SENSOR DIAPHRAGM;
SENSOR OUTPUT;
SENSOR PARAMETER;
SIMULATION TOOL;
TEMPERATURE DEPENDENCE;
THICK-FILM TECHNOLOGY;
CAPACITANCE;
DIAPHRAGMS;
OPTIMIZATION;
PRESSURE SENSORS;
PRESSURE TRANSDUCERS;
MATERIALS PROPERTIES;
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EID: 70449595569
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ISSE.2009.5206986 Document Type: Conference Paper |
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Times cited : (7)
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References (6)
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