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Volumn 518, Issue 24, 2010, Pages 7509-7514
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Tribological properties of Cr-Si-N nanocomposite film adherent silicon under various environments
a
b
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Author keywords
Cr Si N films; Nanocomposite thin films; Pulsed DC magnetron sputtering process; Tribological property
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Indexed keywords
AMBIENT ATMOSPHERE;
ANTI-CORROSION;
ANTI-CORROSION PROPERTY;
BIPOLAR SYMMETRY;
CHROMIUM NITRIDE;
ENHANCED HARDNESS;
HUMID AIR;
NACL AQUEOUS SOLUTION;
NANOCOMPOSITE FILM;
NANOCOMPOSITE THIN FILMS;
OPERATING CONDITION;
PIN ON DISK;
PULSED DC;
PULSED DC MAGNETRON SPUTTERING;
SI CONTENT;
SI SUBSTRATES;
SILICON CONTENTS;
SIN FILMS;
TRIBOLOGICAL PROPERTIES;
WEAR TEST;
CHROMIUM;
CORROSION PROTECTION;
CORROSION RESISTANCE;
HARD COATINGS;
HARDNESS;
MAGNETRON SPUTTERING;
MECHANICAL PROPERTIES;
METALLIC FILMS;
NANOCOMPOSITES;
NITRIDES;
SILICON;
SILICON WAFERS;
SODIUM CHLORIDE;
SOLUTIONS;
THIN FILMS;
TRIBOLOGY;
VAPOR DEPOSITION;
WEAR RESISTANCE;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 77956885215
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2010.05.035 Document Type: Conference Paper |
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Times cited : (16)
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References (22)
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