Deposition behaviours of CrN films on the edge area by cathodic arc plasma deposition process

Thin Solid Films

Volumn 334, Issue 1-2, 1998, Pages 133-139

  Kim, Sang S ^a   Han, Jeon G ^a   Lee, Sang Y ^b  

^a Sungkyunkwan University   (South Korea)

^b Hankuk Aviation University   (South Korea)

Author keywords

Arc ion plating; Bias effect; CrN; Edge effect; Macro particle

Indexed keywords

CATHODIC PROTECTION; CHROMIUM COMPOUNDS; ELECTROPLATING; FILM GROWTH; MORPHOLOGY; PROTECTIVE COATINGS; SPUTTER DEPOSITION; STEEL; SURFACE ROUGHNESS;

ARC ION PLATING; CATHODIC ARC PLASMA DEPOSITION;

METALLIC FILMS;

EID: 0032483866     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01131-6     Document Type: Article

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