EUV Hartmann sensor for wavefront measurements at the Free-electron LASer in Hamburg

New Journal of Physics

Volumn 12, Issue , 2010, Pages

  Flöter, Bernhard ^a   Juranic, Pavle ^b   Kapitzki, Svea ^b   Keitel, Barbara ^b   Mann, Klaus ^a   Plönjes, Elke ^b   Schäfer, Bernd ^a   Tiedtke, Kai ^b  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^b DESY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; BEAM CHARACTERIZATION; BEAM LINES; BEAM PARAMETER; EXTREME ULTRAVIOLETS; FOCAL REGIONS; FOCUSING MIRRORS; HARTMANN; HARTMANN SENSORS; HARTMANN WAVE FRONT SENSORS; HIGH RESOLUTION; INTENSITY DATA; PROFILE MEASUREMENT; ROOT MEAN SQUARE; SOFT X-RAY RANGE; SPOT SIZES; WAVEFRONT ABERRATIONS; WAVEFRONT MEASUREMENT; WAVEFRONT QUALITY; WAVELENGTH RANGES;

ELECTRONS; FREE ELECTRON LASERS; GEOMETRICAL OPTICS; PULSED LASER APPLICATIONS; SENSORS;

WAVEFRONTS;

EID: 77956596348     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/12/8/083015     Document Type: Article

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