Determination of the sputter rate variation pattern of a silicon carbide target for radio frequency magnetron sputtering using optical transmission measurements

Materials Science and Engineering: B

Volumn 174, Issue 1-3, 2010, Pages 127-131

  Galvez De La Puente G ^a,b   Guerra Torres, J A ^a   Erlenbach, O ^a,b   Steidl, M ^b   Weingartner R ^a,b   De Zela, F ^a   Winnacker, A ^b  

^a PONTIFICIA UNIVERSIDAD CATÓLICA DEL PERÚ   (Peru)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Deposition rate; Film thickness determination; Magnetron sputtering; Optical constants; Thin films; Wide bandgap semiconductor

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; DEPOSITION RATES; FILM THICKNESS; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; RADIO WAVES; RATE CONSTANTS; SILICON CARBIDE; WIDE BAND GAP SEMICONDUCTORS;

EMISSION PATTERN; FILM THICKNESS DETERMINATION; FILM-THICKNESS; MAGNETRON-SPUTTERING; OPTICAL TRANSMISSION MEASUREMENTS; PROCESS PARAMETERS; RADIO-FREQUENCY-MAGNETRON SPUTTERING; THICKNESS DETERMINATION; THIN-FILMS; WIDE-BAND-GAP SEMICONDUCTOR;

THIN FILMS;

EID: 77956471365     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2010.03.012     Document Type: Conference Paper

References (13)

1. A.J. Steckl, and J.M. Zavada MRS Bull. 24 1999 16
2. Weingärtner, O. Erlenbach, F. De Zela, A. Winnacker, I. Brauer, and H.P. Strunk Mater. Sci. Forum 527-529 2006 663
3. R. Weingärtner, O. Erlenbach, A. Winnacker, A. Welte, I. Brauer, H. Mendel, H.P. Strunk, C.T.M. Ribeiro, and A.R. Zanatta Opt. Mater. 28 2006 790
4. S.B. Aldabergenova, A. Osvet, G. Frank, H.P. Strunk, P.C. Taylor, and A.A. Andreev J. Non-Cryst. Sol. 299-302 2002 709
5. H. Mendel, S.B. Aldabergenova, R. Weingärtner, G. Frank, H.P. Strunk, and A.A. Andreev Opt. Mater. 28 2006 794
6. A.R. Zanatta J. Phys. D: Appl. Phys. 42 2009 025109
7. U. Hömmerich, Ei Nyein, D.S. Lee, A.J. Steckl, and J.M. Zavada Appl. Phys. Lett. 83 2003 4556
8. R. Weingärtner, J.A. Guerra Torres, O. Erlenbach, G. Gálvez de la Puente, F. De Zela, and A. Winnacker Mater. Sci. Eng. B 174 2010 114
9. M. Bickermann, D. Hofmann, M. Rasp, T.L. Straubinger, R. Weingärtner, P.J. Wellmann, and A. Winnacker Mater. Sci. Forum 353-356 2001 49
10. M. Bickermann, B.M. Epelbaum, D. Hofmann, T.L. Straubinger, R. Weingärtner, and A. Winnacker J. Cryst. Growth 233 2001 211
11. R. Swanepoel J. Phys. E: Sci. Instrum. 16 1983 1214
12. J.C. Manifacier, J. Gasiot, and J.P. Fillard J. Phys. E: Sci. Instrum. 9 1976 1002
13. D. Poelman, and P.F. Smet J. Phys. D: Appl. Phys. 36 2003 1850