Biochemical sensing with a polymer-based micromachined Fabry-Perot sensor

Optics Express

Volumn 18, Issue 17, 2010, Pages 18394-18400

  Zhang, Tianhua ^a   Talla, Shantan ^a   Gong, Zhongcheng ^a   Karandikar, Sukrut ^a,b   Giorno, Rebecca ^b   Que, Long ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIBER OPTIC SENSORS; GLASS; GLASS BONDING; LIGHT SOURCES; MICROCHANNELS; REFRACTIVE INDEX; SENSORS; SUBSTRATES;

BIO-CHEMICAL SENSOR; BIOCHEMICAL SENSING; EFFECTIVE REFRACTIVE INDEX; FABRY PEROT SENSORS; FABRY-PEROT; FABRY-PEROT CAVITY; GLASS SUBSTRATES; MICROMACHINED; PERFORMANCE OPTIMIZATIONS; TRANSDUCING; WHITE LIGHT SOURCES;

FABRY-PEROT INTERFEROMETERS;

DIMETICONE; GLASS; IMMOBILIZED ANTIBODY; IMMUNOGLOBULIN G; NYLON; POLY(DIMETHYLSILOXANE) POLYAMIDE COPOLYMER; POLY(DIMETHYLSILOXANE)-POLYAMIDE COPOLYMER;

ANIMAL; ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; GENETIC PROCEDURES; INSTRUMENTATION; INTERFEROMETRY; METHODOLOGY; MICROTECHNOLOGY; RABBIT; THEORETICAL MODEL;

ANIMALS; ANTIBODIES, IMMOBILIZED; BIOSENSING TECHNIQUES; DIMETHYLPOLYSILOXANES; EQUIPMENT DESIGN; GLASS; IMMUNOGLOBULIN G; INTERFEROMETRY; MICROTECHNOLOGY; MODELS, THEORETICAL; NYLONS; RABBITS;

EID: 77956390207     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.018394     Document Type: Article

References (22)

1. Z. D. Popovic, R. A. Sprague, and G. A. Connell, "Technique for monolithic fabrication of microlens arrays," Appl. Opt. 27(7), 1281-1284 (1988).
2. C. H. Lee, H. Yoshida, Y. Miura, A. Fujii, and M. Ozaki, ""Fabrication of micro-grating structures by direct laser writing based on two photon process and their liquid crystal alignment abilities," IEICE Transactions on Electronics," E 91-C(10), 1581-1586 (2008).
3. L. Hornbeck, "Deformable-mirror spatial light modulators," Proc. SPIE, Spatial Light Modulators and Applications III, v.1150, 86-102 (1990)
4. Q. Xu, and M. Lipson, "All-optical logic based on silicon micro-ring resonators," Opt. Express 15(3), 924-929 (2007).
5. C. Wang, B. Wherrett, and T. Harvey, "Fabrication and characterization of a 4×4 array of asymmetric Fabry- Perot reflection modulators," Electron. Lett. 30(15), 1219-1220 (1994).
6. N. Hall, and F. Degertekin, "Integrated optical interferometric detection method for micromachined capacitive acoustic transducers," Appl. Phys. Lett. 80(20), 3859-3861 (2002).
7. J. Han, "Fabry-Perot cavity chemical sensors by silicon micromachining techniques," Appl. Phys. Lett. 74(3), 445-447 (1999).
8. L. Que, "Two-dimensional tunable filter array for a matrix of integrated fiber optic input-output light channels", US Patent 6,449,410 (2002)
9. M. Blomberg, O. Rusanen, and K. Keranen, "A silicon microsystem-miniaturized infrared spectrometer," Proc. 9th Int. Conf. On Solid-state Sensors, Actuators and Microsystems, 1257-1258 (1997)
10. N. Neumann, M. Ebermann, K. Hiller, and S. Kurth, "Tunable infrared detector with integrated micromachined Fabry-Perot filter," Proceedings of the SPIE, v. 6466, 646606-646612 (2007)
11. L. Que, A. Zribi, A. Banerjee, and D. Hays, "Raman system on a chip," US Patent 7,505,128 (2009)
12. T. Dohi, K. Matsumoto, and I. Shimoyama, "The optical blood test device with the micro Fabry-Perot interferometer", Proceedings of IEEE MEMS, 403-406 (2004)
13. T. Dohi, K. Matsumoto, and I. Shimoyama, "The micro Fabry-Perot interferometer for the spectral endoscope", Proceedings of IEEE MEMS, 830-833 (2005)
14. K. M. van Delft, J. C. Eijkel, D. Mijatovic, T. S. Druzhinina, H. Rathgen, N. R. Tas, A. van den Berg, and F. Mugele, "Micromachined Fabry-Pérot interferometer with embedded nanochannels for nanoscale fluid dynamics," Nano Lett. 7(2), 345-350 (2007).
15. Y. Zhang, H. Shibru, K. L. Cooper, and A. Wang, "Miniature fiber-optic multicavity Fabry-Perot interferometric biosensor," Opt. Lett. 30(9), 1021-1023 (2005).
16. J. Liu, Y. Sun, and X. Fan, "Highly versatile fiber-based optical Fabry-Pérot gas sensor," Opt. Express 17(4), 2731-2738 (2009).
17. M. Born, and E. Wolf, Principal of Optics (John Wiley & Sons, Inc., 2000)
18. S. Jiang, B. Zeng, Y. Liang, and B. Li, "Optical fiber sensor for tensile and compressive strain measurement by white-light Faby-Perot interferometry," Opt. Eng. 46(3), 034402 (2007).
19. T. Zhang, Z. Gong, and L. Que, "A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor," Proc. of IEEE Intl. Conf. on NEMS, 177-180 (2009)
20. S. Zangooi, R. Bjorklund, and H. Arwin, "Protein adsorption in thermally oxidized porous silicon layers," Thin Solid Films 313-314(1-2), 825-830 (1998).
21. T. Zhang, Z. Gong, R. Giorno, and L. Que, "Signal sensitivity and intensity enhancement for a polymer-based Fabry-Perot interferometer with embedded nanostructures in its cavity," Proceeding of 15th International Conference on Solid-State Sensors, Actuators & Microsystems (Transducers'09), 2310-2313 (2009)
22. J. Zhao, X. Zhang, C. R. Yonzon, A. J. Haes, and R. P. Van Duyne, "Localized surface plasmon resonance biosensors," Nanomedicine (Lond) 1(2), 219-228 (2006).