Tunable infrared detector with integrated micromachined Fabry-Perot filter

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6466, Issue , 2007, Pages

  Neumann, Norbert ^a   Ebermann, Martin ^a   Hiller, Karla ^b   Kurth, Steffen ^c  

^a INFRATEC GMBH   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c FRAUNHOFER IZM   (Germany)

Author keywords

Anti reflection coating; Bragg reflector; Bulk micromachining; Fabry Perot filter; Finesse; Infrared filter

Indexed keywords

ANTIREFLECTION COATINGS; BANDWIDTH; BRAGG REFLECTORS; MICROMACHINING; OPTICAL FILTERS; PHASE SHIFT;

BULK MICROMACHINING; FABRY-PEROT FILTERS; FINESSE; INFRARED FILTERS;

INFRARED DETECTORS;

EID: 34247373547     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.698871     Document Type: Conference Paper

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