Optimization of metallic microheaters for high-speed reconfigurable silicon photonics

Optics Express

Volumn 18, Issue 17, 2010, Pages 18312-18323

  Atabaki, A H ^a   Hosseini, E Shah ^a   Eftekhar, A A ^a   Yegnanarayanan, S ^a   Adibi, A ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; PHOTONIC DEVICES; PHOTONICS;

HEAT TRANSPORT MODELING; HIGH-SPEED; LOW LOSS; LOW POWER; MATERIAL OPTIMIZATION; MICRO-HEATERS; MICROHEATER; OPTIMIZED STRUCTURES; PULSED EXCITATION; RE-CONFIGURABLE; RECONFIGURATION TIME; SILICON PHOTONICS; SUB-MICROSECOND; SYSTEM-LEVEL MODELS; THERMOOPTIC EFFECTS;

STRUCTURAL OPTIMIZATION;

METAL; SILICON DIOXIDE;

ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; HEAT; INSTRUMENTATION; OPTICAL INSTRUMENTATION; OPTICS;

EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; HOT TEMPERATURE; METALS; OPTICAL DEVICES; OPTICS AND PHOTONICS; SILICON DIOXIDE;

EID: 77956366693     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.018312     Document Type: Article

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