X-ray diffuse scattering from threading dislocations in epitaxial GaN layers

Journal of Applied Physics

Volumn 108, Issue 4, 2010, Pages

  Barchuk, M ^a,b   Holy V ^a   Miljevic B ^b   Krause, B ^b   Baumbach, T ^b   Hertkorn, J ^c   Scholz, F ^c  

^a CHARLES UNIVERSITY   (Czech Republic)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^c UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSE X-RAY SCATTERING; DISLOCATION DENSITIES; GAN EPITAXIAL LAYERS; GAN LAYERS; HETEROEPITAXIAL LAYERS; MONTE CARLO SIMULATION METHODS; SCATTERED X-RAYS; SIMULATED DISTRIBUTION; THREADING DISLOCATION; X-RAY DIFFUSE SCATTERING;

COMPUTER SIMULATION; GALLIUM ALLOYS; GALLIUM NITRIDE; MONTE CARLO METHODS; SCATTERING; X RAY SCATTERING;

X RAYS;

EID: 77956333562     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3460803     Document Type: Conference Paper

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