SCOPUS 정보 검색 플랫폼

Volumn 163-164, Issue , 2003, Pages 654-658

Performance of radio frequency hollow cathodes at low gas pressures

Author keywords

Arc evaporation; Hollow cathode plasma; Radio frequency; Titanium nitride; X ray diffraction

Indexed keywords

ELECTRONS; EVAPORATORS; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; PLASMA DENSITY;

HOLLOW CATHODES;

CATHODES;

CATHODE; LOW PRESSURE;

CATHODE; FREQUENCY MODULATION; GAS FLOW; GAS PRESSURE; MAGNET; MATERIAL COATING; MICROWAVE OVEN;

EID: 0037472578 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00691-6 Document Type: Article

Times cited : (35)

References (15)

1
- 0020140922
- D.M. Goebel, A.T. Forrester, Rev. Sci. Instr. 53 (1982) 810.
- (1982) Rev. Sci. Instr. , vol.53 , pp. 810
- Goebel, D.M.¹ Forrester, A.T.²

2
- 0033883734
- G. Rohrbach, A. Lunk, Surf. Coat. Technol. 123 (2000) 231.
- (2000) Surf. Coat. Technol. , vol.123 , pp. 231
- Rohrbach, G.¹ Lunk, A.²

3
- 13544271001
- L. Bárdoš, Surf. Coat. Technol. 86-87 (1996) 648.
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 648
- Bárdoš, L.¹

4
- 0015958716
- L. Marton (Ed.), Academic Press, New York
- J.-L. Delcroix, A.R. Trindade, in: L. Marton (Ed.), Advances in Electronics and Electron Physics, 35, Academic Press, New York, 1974, p. 87.
- (1974) Advances in Electronics and Electron Physics , vol.35 , pp. 87
- Delcroix, J.-L.¹ Trindade, A.R.²

5
- 0033887528
- D. Isfort, V. Buck, Plasma Sources Sci. Technol. 9 (2000) 25.
- (2000) Plasma Sources Sci. Technol. , vol.9 , pp. 25
- Isfort, D.¹ Buck, V.²

6
- 84953681392
- J.J. Cuomo, S.M. Rossnagel, J. Vac. Sci. Technol. A 4 (1986) 393.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 393
- Cuomo, J.J.¹ Rossnagel, S.M.²

7
- 0025662649
- A. Lunk, Vacuum 41 (1990) 1965.
- (1990) Vacuum , vol.41 , pp. 1965
- Lunk, A.¹

8
- 0001296613
- C.M. Horwitz, Appl. Phys. Lett. 43 (1983) 977.
- (1983) Appl. Phys. Lett. , vol.43 , pp. 977
- Horwitz, C.M.¹

9
- 0022819754
- C. Lejune, J.P. Grandchamp, O. Kessi, J.P. Giles, Vacuum 36 (1986) 837.
- (1986) Vacuum , vol.36 , pp. 837
- Lejune, C.¹ Grandchamp, J.P.² Kessi, O.³ Giles, J.P.⁴

10
- 3543123011
- H. Baránková, L. Bárdoš, Surf. Coat. Technol. 146-147 (2001) 486.
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 486
- Baránková, H.¹ Bárdoš, L.²

11
- 0004336382
- PCT/SE98/01983
- H. Baránková, L. Bárdoš, Swedish Patent No 9704260-0, PCT/SE98/01983.
- Swedish Patent No 9704260-0
- Baŕanková, H.¹ Bárdoš, L.²

12
- 0032620090
- Chicago 1999, ISSN 0737-5921-Paper PE-9, Proc
- H. Baránková, L. Bárdoš, Proceedings of the 42nd Annual Tech. Conf. of the Society of Vacuum Coaters (SVC), Chicago 1999, ISSN 0737-5921-Paper PE-9, Proc. pp. 136-137.
- Proceedings of the 42nd Annual Tech. Conf. of the Society of Vacuum Coaters (SVC) , pp. 136-137
- Bárankovǎ, H.¹ Bárdoš, L.²

13
- 0035465619
- L. Bárdoš, H. Baránková, Surf. Coat. Technol. 146-147 (2001) 463.
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 463
- Bárdoš, L.¹ Baránková, H.²

14
- 0012755735
- W.-J. Chou, G.-P. Yu, J.-H. Huang, Surf. Coat. Technol. 149 (2002).
- (2002) Surf. Coat. Technol. , vol.149
- Chou, W.-J.¹ Yu, G.-P.² Huang, J.-H.³

15
- 0035907497
- M. Chen, G.P. Yu, J.H. Huang, Surf. Coat. Technol. 141 (2001) 156.
- (2001) Surf. Coat. Technol. , vol.141 , pp. 156
- Chen, M.¹ Yu, G.P.² Huang, J.H.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.