Locally enhanced discharges at gas hole outlets of a showerhead in a plasma etching reactor

Journal of Physics D: Applied Physics

Volumn 42, Issue 3, 2009, Pages

  Denpoh, K ^a  

^a TOKYO ELECTRON LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; EROSION; GASES; PLASMA ETCHING; PLASMA SIMULATION;

BULK ELECTRONS; ENERGETIC ELECTRONS; EROSION PROFILES; GAS HOLES; GAS PRESSURES; MODELLING AND SIMULATIONS; PLASMA ETCHING REACTORS; PROCESS GAS; PROCESS PRESSURES; SHOWERHEAD;

PHASE INTERFACES;

EID: 63649097740     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/3/032003     Document Type: Article

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