Fabrication of ordered trench structures with high aspect ratios by anisotropic anode etching of Al(100)

Electrochemical and Solid-State Letters

Volumn 13, Issue 7, 2010, Pages

  Fukushima, Tatsuro ^a   Takeda, Akifumi ^a   Nishio, Kazuyuki ^a   Masuda, Hideki ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AL FOIL; ANODE ETCHING; GEOMETRICAL STRUCTURE; HIGH ASPECT RATIO; PERIODIC LINES; THIN POLYMERS;

ALUMINUM; ALUMINUM FOIL; ANISOTROPY; ASPECT RATIO; ELECTROLYTES;

ANISOTROPIC ETCHING;

EID: 77956194003     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3388511     Document Type: Article

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