Residual stress of Pb(ZrxTi1-x)O3 films with mixed textures

Journal of Alloys and Compounds

Volumn 506, Issue 1, 2010, Pages 167-171

  Wang, J N ^a   Li, W L ^a   Feng, B ^a   Liu, C Q ^a   Li, X L ^a   Sun, Q ^a   Fei, W D ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Phase composition; Residual stress; Sol gel; Texture

Indexed keywords

PZT FILM; RESIDUAL COMPRESSIVE STRESS; SI SUBSTRATES; SOL-GEL TECHNIQUE; SPONTANEOUS POLARIZATION DIRECTIONS; X-RAY DIFFRACTION METHOD; ZR/TI RATIO;

CRACK INITIATION; GELS; LATTICE MISMATCH; LEAD; PHASE COMPOSITION; RESIDUAL STRESSES; SOL-GEL PROCESS; SOL-GELS; SOLS; TENSILE STRESS; X RAY DIFFRACTION; ZIRCONIUM;

TEXTURES;

EID: 77956095004     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2010.06.170     Document Type: Article

References (30)

1. K. Uchino Piezoelectric Actuators and Ultrasonic Motors 1996 Kluwar Academic Boston
2. I.A. Kornev, L. Bellaiche, P.-E. Janolin, B. Dkhil, and E. Suard Phys. Rev. Lett. 97 2006 157601
3. L.B. Freund, and S. Suresh Thin Film Materials: Stress, Defect Formation and Surface Evolution 2003 Cambridge University Press
4. D.A. Hall, A. Steuwer, B. Cherdhirunkorn, T. Mori, and P.J. Withers Acta Mater. 54 2006 3075 3083
5. F. Yang, and W.D. Fei Key Eng. Mater. 280-283 2005 857 860
6. D.E. Jesson, S.J. Pennycook, and J.M. Baribeau Phys. Rev. Lett. 66 1991 750 753
7. J.A. Floro, S.J. Hearne, J.A. Hunter, P. Kotula, E. Chason, S.C. Seel, and C.V. Thompson J. Appl. Lett. 89 2001 4886 4897
8. M.F. Doerner, and W.D. Nix CRC Crit. Rev. Solid State Mater. Sci. 14 1988 225 268
9. C.Q. Liu, W.D. Fei, and W.L. Li J. Phys. D: Appl. Phys. 41 2008 125404
10. J.W. Lee, G.T. Park, C.S. Park, and H.E. Kim Appl. Phys. Lett. 88 2006 072908
11. N.A. Pertsev, V.G. KuKhar, H. Kohlstedt, and R. Waser Phys. Rev. B 67 2003 054107
12. C.Q. Liu, W.D. Fei, and W.L. Li Thin Solid Film 516 2008 1265 1270
13. S.H. Oh, and H.M. Jang J. Appl. Phys. 85 1999 2815 2820
14. L. Meda, K.H. Dahmen, S. Hayek, and H. Garmestani J. Cryst. Growth 263 2004 185 191
15. G. Abadias, and Y.Y. Tse J. Appl. Phys. 95 2005 2414 2428
16. M.V. Leeuwen, J.D. Kamminga, and E.J. Mittemeijer J. Appl. Phys. 86 1999 1904 1914
17. A. Reuss, and Z. Angew Math Mech. 9 1929 49 58
18. W. Voigt Lehrbuch der Kristallphysik 1910 Leipzig Teubner p. 369
19. W.D. Fei, C.Q. Liu, M.H. Ding, W.L. Li, and L.D. Wang Rev. Sci. Instrum. 80 2009 093903
20. Z. Huang, Q. Zhang, and R.W. Whatmore J. Appl. Phys. 85 1999 7355 7361
21. L. Lian, and N.R. Sottos J. Appl. Phys. 87 2000 3941 3949
22. S.Y. Chen, and C.L. Sun J. Appl. Phys. 90 2001 2970 2974
23. B.G. Chae, Y.S. Yang, S.H. Lee, M.S. Jang, S.J. Lee, S.H. Kim, W.S. Baek, and S.C. Kwon Thin Solid Film 410 2002 107 113
24. X.J. Zheng, Y.C. Zhou, and J.Y. Li Acta Mater. 51 2003 3985 3997
25. D.A. Berlincourt, C. Cmolik, and H. Jaffe Proc. IRE 48 1960 220 229
26. B. Noheda, D.E. Cox, G. Shirane, R. Guo, B. Jones, and L.E. Cross Phys. Rev. B 63 2000 014103
27. I.A. Kornev, L. Bellaiche, P.E. Janolin, B. Dkhil, and E. Suard Phys. Rev. Lett. 97 2006 157601
28. E.B. Araújo, E.C. Lima, J.D.S.A. Guerra, O. dos Santos, L.P. Cardoso, and M.U. Kleinke J. Phys.: Condens. Matter 20 2008 415203
29. A.K. Singh, D. Pandey, S. Yoon, S. Baik, and N. Shin Appl. Phys. Lett. 91 2007 192904
30. J. Rouquette, J. Haines, V. Bornand, M. Pintard, Ph. Papet, W.G. Marshall, and S. Hull Phys. Rev. B 71 2005 024112