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Thin Solid Films

Volumn 518, Issue 22, 2010, Pages 6348-6351

Effect of thermal annealing on Ni/Au contact to a-InGaZnO films deposited by dc sputtering

(4) Kim, Hyunghoon a Moon, Jin Yong a Heo, Young Woo a Lee, Ho Seong a

a Kyungpook National University (South Korea)

Author keywords

a InGaZnO; Contact resistance; dc sputtering; Ni Au; Ohmic contact

Indexed keywords

A-INGAZNO; ANNEALED SAMPLES; CONTACT INTERFACE; CURRENT-VOLTAGE MEASUREMENTS; DC SPUTTERING; LOW RESISTANCE; LOW TEMPERATURES; NI/AU; OHMIC BEHAVIOR; POSTGROWTH THERMAL ANNEALING; SPECIFIC CONTACT RESISTANCES; THERMAL-ANNEALING;

ANNEALING; CONTACT RESISTANCE; ELECTRIC CONTACTORS; ELECTRIC PROPERTIES; OHMIC CONTACTS;

GOLD COATINGS;

EID: 77956059250 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.02.054 Document Type: Conference Paper

Times cited : (14)

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