Location- and orientation-controlled (100) and (110) single-grain Si TFTs without seed substrate

IEEE Transactions on Electron Devices

Volumn 57, Issue 9, 2010, Pages 2348-2352

  Chen, Tao ^a   Ishihara, Ryoichi ^a   Beenakker, Kees ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Laser crystallization; thin film transistors

Indexed keywords

CHANNEL TRANSISTORS; CZOCHRALSKI PROCESS; FIELD-EFFECT MOBILITIES; LASER CRYSTALLIZATION; N-CHANNEL TRANSISTORS; SINGLE-GRAIN THIN-FILM TRANSISTOR;

CRYSTALLIZATION; EXCIMER LASERS; GAS LASERS;

THIN FILM TRANSISTORS;

EID: 77956058713     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2010.2055510     Document Type: Article

References (6)

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