Variations in cross-link density with deposition pressure in ultrathin plasma polymerized benzene and octafluorocyclobutane films

Polymer

Volumn 51, Issue 19, 2010, Pages 4390-4397

  Peri, Someswara R ^a   Habersberger, Brian ^a   Akgun, Bulent ^b,c   Jiang, Hao ^d   Enlow, Jesse ^d   Bunning, Timothy J ^d   Majkrzak, Charles F ^b   Foster, Mark D ^a  

^a The University of Akron   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

^d AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Cross link density; Neutron reflectometry; Plasma enhanced chemical vapor deposition

Indexed keywords

BENZENE; NEUTRON REFLECTION; PLASMA CVD; REFLECTION; REFLECTOMETERS; ULTRATHIN FILMS;

CROSS-LINK DENSITIES; DEPOSITION CONDITIONS; DEPOSITION PRESSURES; MEASUREMENTS OF; NEUTRON REFLECTOMETRY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); PROCESSING PRESSURE; TRANSITION LAYERS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CROSS LINKING; FILM; PLASMA TREATMENT; POLYMERIZATION; PRECURSOR; SUBSTRATE;

EID: 77955984968     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.polymer.2010.07.026     Document Type: Article

References (39)

1. Biederman Y. Plasma polymer films 2004, Imperial College Press, London.
2. Endo K., Shinoda K., Tatsumi T. J Appl Phys 1999, 86(5):2739.
3. Grant J.T., Jiang H., Tullis S., Johnson W.E., Eyink K., Fleitz P., et al. Vacuum 2005, 80(1-3):12.
4. Silverstein M.S., Visoly I., Kesler O., Janai M., Cassuto Y. J Vac Sci Technol B 1998, 16(6):2957.
5. Benitez F., Martinez E., Galan M., Serrat J., Esteve J. Surf Coat Tech 2000, 125(2-3):383.
6. Dilsiz N., Akovali G. Polymer 1996, 37(2):333.
7. Yasuda H.K. Plasma polymerization 1985, Academic Press, Orlando.
8. Nelson A., Muir W.B., Oldham J., Fong C., McLean K.M., Hartley P.G., et al. Langmuir 2006, 22(1):453.
9. Kim H., Foster M.D., Jiang H., Tullis S., Bunning T.J., Majkrzak C.F. Polymer 2004, 45(10):3175.
10. Jeon S.H., Wyatt J., Harper-Nixon D., Weinkauf D.H. J Polym Sci Part B Polym Phys 2004, 42(13):2522.
11. Kent-Blasie J., Zheng S., Strzalka J. Phys Rev B 2003, 67(22):224201.
12. Lagomarsino S., Di Fonzo S., Jark W., Muller B., Cedola A., Pelka G. Mater Res Soc Symp Proc 2005, 382:381.
13. Benattar J.J., Schalchli A. Phys Scr 1994, 50(2):188.
14. Geer R., Qadri S., Shashidhar R., Thibodeaux F.A., Duran S.R. Liq Cryst 1994, 16(5):869.
15. Ziegler E., Ferrero C., Lamy F., Chapron C., Morawe Ch Adv X-Ray Anal 2002, 45:345.
16. Zymierska D., Sobczak E., Godwod K., Miotkowska S. Appl Crystallogr 1998, 17:394.
17. Commercial materials, instruments and equipment are identified in this paper in order to specify the experimental procedure as completely as possible. In no case does such identification imply a recommendation or endorsement by the National Institute of Standards and Technology nor does it imply that the materials, instruments, or equipment identified are necessarily best available for the purpose.
18. Majkrzak C.F., Berk N.F., Perez-Salas U.A. Langmuir 2003, 19(19):7796.
19. Foster M.D. Crit Rev Anal Chem 1993, 24(3):179.
20. Parratt L.G. Phys Rev 1954, 95:359.
21. Peri SR, Kim H, Akgun B, Enlow J, Jiang H, Bunning TJ, Li X, Foster MD, submitted for publication.
22. Morosoff N., Haque R., Clymer S.D., Crumbliss A.L. J Polym Sci Part A Polym Chem 1985, 3(6):2098.
23. Engleman R.A., Yasuda H.K. Polym Mater Sci Engr 1990, 62:19.
24. Gengenbach T.R., Chatelier R.C., Vasic Z.R., Griesser H.J. Polym Prep (Am Chem Soc Div Polym Chem) 1993, 34:687.
25. Gengenbach T.R., Vasic Z.R., Chatelier R.C., Griesser H.J. J Polym Sci Part A Polym Chem 1994, 32(8):1399.
26. Gengenbach T.R., Chatelier R.C., Griesser H.J. Surf Interface Anal 1996, 24(4):271.
27. Gengenbach T.R., Chatelier R.C., Griesser H.J. Surf Interface Anal 1996, 24(4):611.
28. Gengenbach T.R., Griesser H.J. Polymer 1999, 40(18):5079.
29. Kuzuya M., Ito H., Kondo S., Noda N., Noguchi A. Macromolecules 1991, 24(25):6612.
30. Kuzuya M., Noguchi A., Ito H., Kondo S., Noda N. J Polym Sci Part A Polym Chem 1991, 29(1):1.
31. Kuzuya M., Noguchi A., Ishikawa M., Koide A., Sawada K., Ito A., et al. J Phys Chem 1991, 95(6):2398.
32. Kuzuya M., Morisaki K., Niwa J., Yamauchi Y., Xu K. J Phys Chem 1994, 98(44):11301.
33. Jiang H., Grant J.T., Enlow J., Su W., Bunning T.J. J Mater Chem 2009, 19(15):2234.
34. Jiang H., Hong L., Venkatasubramanian N., Grant J.T., Eyink K., Wiacek K., et al. Thin Solid Films 2007, 515(7-8):3513.
35. Förch R., Zhang Z., Knoll W. Plasma Processes Polym 2005, 2(5):351.
36. Kim Y., Lee J., Kim K. J Vac Sci Technol A 2009, 27(4):900.
37. Zheng L., Ling L., Hua X., Oehrlein G.S., Hudson E.A. J Vac Sci Technol A 2005, 23(4):634.
38. Garrison M.D., Luginbühl R., Overney R.M., Ratner B.D. Thin Solid Films 1999, 352(1):13.
39. Favia P., Perez-Luna V.H., Boland T., Castner D.G., Ratner B.D. Plasmas Polym 1996, 1(4):299.