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Volumn 80, Issue 1-3, 2005, Pages 12-19
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The growth and characterization of photonic thin films
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Author keywords
CVD; FTIR; Polymerization; Thin films; VASE; XPS
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Indexed keywords
BENZENE;
BUTANE;
COMPOSITION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
PHOTONS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYMERIZATION;
SUBSTRATES;
X RAY PHOTOELECTRON SPECTROSCOPY;
ATOMIC COMPOSITION;
PHOTONIC FILMS;
VASE;
THIN FILMS;
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EID: 25444447661
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2005.07.022 Document Type: Conference Paper |
Times cited : (18)
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References (22)
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