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Volumn 49, Issue 14, 2010, Pages 2539-2546

Optical constants of crystalline HfO2 for energy range 140-930 eV

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ELEMENTS; KRAMERS-KRONIG RELATIONS; OPTICAL CONSTANTS; SYNCHROTRON RADIATION;

EID: 77955940332     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.49.002539     Document Type: Article
Times cited : (17)

References (25)
  • 1
    • 0035872897 scopus 로고    scopus 로고
    • High-K gate dielectrics: Current status and materials properties considerations
    • G. D. Wilk, R. M. Wallace, and J. M. Anthony, "High-K gate dielectrics: current status and materials properties considerations", J. Appl. Phys. 89, 5243-5275 (2001).
    • (2001) J. Appl. Phys. , vol.89 , pp. 5243-5275
    • Wilk, G.D.1    Wallace, R.M.2    Anthony, J.M.3
  • 2
    • 0000361018 scopus 로고    scopus 로고
    • Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealing
    • B. H. Lee, L. Kang, R. Nieh, W. J. Qi, and J. C. Lee, "Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealing", Appl. Phys. Lett. 76, 1926-1928 (2000).
    • (2000) Appl. Phys. Lett. , vol.76 , pp. 1926-1928
    • Lee, B.H.1    Kang, L.2    Nieh, R.3    Qi, W.J.4    Lee, J.C.5
  • 3
    • 0034739021 scopus 로고    scopus 로고
    • Alternative dielectrics to silicon dioxide for memory and logic devices
    • A. I. Kingon, J.-P. Maria, and S. K. Streiffer, "Alternative dielectrics to silicon dioxide for memory and logic devices", Nature 406, 1032-1038 (2000).
    • (2000) Nature , vol.406 , pp. 1032-1038
    • Kingon, A.I.1    Maria, J.-P.2    Streiffer, S.K.3
  • 9
    • 0004932883 scopus 로고
    • X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E = 50-30000eV, Z = 1-92
    • B. L. Henke, E. M. Gullikson, and J. C. Davis, "X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30000eV, Z = 1-92", At. Data Nucl. Data Tables 54, 181-342 (1993).
    • (1993) At. Data Nucl. Data Tables , vol.54 , pp. 181-342
    • Henke, B.L.1    Gullikson, E.M.2    Davis, J.C.3
  • 10
    • 0004040706 scopus 로고    scopus 로고
    • E. D. Palik, ed, Academic, and III
    • E. D. Palik, ed. Handbook of Optical Constants of Solids (Academic, 1997), Vols. I, II, and III.
    • (1997) Handbook of Optical Constants of Solids , vol.1-2
  • 14
    • 0000309733 scopus 로고
    • Causality and the dispersion relation: Logical foundations
    • J. S. Toll, "Causality and the dispersion relation: logical foundations", Phys. Rev. 104, 1760-1770 (1956).
    • (1956) Phys. Rev. , vol.104 , pp. 1760-1770
    • Toll, J.S.1
  • 16
    • 77955931553 scopus 로고    scopus 로고
    • Nonlinear optics basics. Kramers-Kronig relations in nonlinear optics
    • R. D. Guenther, ed. Academic
    • M. Sheik-Bahae, "Nonlinear optics basics. Kramers-Kronig relations in nonlinear optics", in Encyclopedia of Modern Optics, R. D. Guenther, ed. (Academic, 2005).
    • (2005) Encyclopedia of Modern Optics
    • Sheik-Bahae, M.1
  • 20
    • 84876680741 scopus 로고    scopus 로고
    • see
    • Reflectometer station, see http://www.bessy.de/upload/bitpdfs/ reflectometer.pdf
    • Reflectometer Station
  • 21
    • 84876695525 scopus 로고    scopus 로고
    • see
    • Optics beamline, see http://www.bessy.de/upload/bitpdfs/D-08-1B2.pdf
    • Optics Beamline


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.