On-wafer electro-mechanical characterization of silicon MEMS switches

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 281-285

  Lorenzelli, L ^a   Rangra, K J ^b   Collini, C ^a   Giacomozzi, F ^a   Margesin, B ^a   Pianegiani, F ^b  

^a ITC IRST   (Italy)

^b UNIVERSITY OF TRENTO   (Italy)

Author keywords

Capacitance measurement; Character generation; Communication switching; Fabrication; Microswitches; Radiofrequency microelectromechanical systems; Silicon; Switches; Voltage; Wireless communication

Indexed keywords

EID: 77955850866     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287053     Document Type: Conference Paper

References (6)

1. G Gabreil M. Rebíez and Jeremy B. Muldabin,"RF MEMS Switches and switch circuits", Technical Digest IEEE Microwave magazine, 2001, 59-71.
2. th European Conference on Solid State transducers, 2002, 1-34, Prague, Czech Republic.
3. J. Rizk,G-L Tan, J. Muldabin, G. Rebeiz "High Isolation W-band MEMS switches", IEEE Microwave and Wireless components Letters, 2001, 11(1), 10-12.
4. Z. J. Yao , S.Chen, S. Eshelman, D. Denniston and C. Goldsmith, "Micromachined low loss microwave switches" IEEE J. MEMS 8, 1999, 129-34.
5. C. Goldsmith, J. Randall, S. Eshelman, T. H. Lin, D. Denniston, S. Chen and B. Norvell, "Characteristics of micromachined switches at Microwave Frequencies", IEEE MIT-S Digest 1996, 1141-1144.
6. C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, A. Yao, J. Brank and M. Eberly, "Lifetime characterization of capacitive RF MEMS switches", IEEE MIT-S Digest 2001, 227-230.