Dislocation density assessment via X-ray GaN rocking curve scans

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 7, Issue 7-8, 2010, Pages 1787-1789

  Booker, I ^a   Rahimzadeh Khoshroo, L ^a   Woitok, J F ^b   Kaganer, V ^c   Mauder, C ^a   Behmenburg, H ^a   Gruis, J ^a   Heuken, M ^a,d   Kalisch, H ^a   Jansen, R H ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b PANalyticalBV   (Netherlands)

^c PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

^d AIXTRON AG   (Germany)

Author keywords

Dislocations; GaN; TEM; Theory of crystal defects; XRD

Indexed keywords

DISLOCATIONS; GAN; TEM; THEORY OF CRYSTAL DEFECTS; XRD;

CRYSTAL DEFECTS; DIFFRACTION; EDGE DISLOCATIONS; GALLIUM NITRIDE; SCREW DISLOCATIONS; X RAY DIFFRACTION; X RAYS;

GALLIUM ALLOYS;

EID: 77955800401     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200983615     Document Type: Conference Paper

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