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Volumn 7, Issue 7-8, 2010, Pages 1941-1943
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Impact of Al2O3 incorporation on device performance of HfO2 gate dielectric AlGaN/GaN MIS-HFETs
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Author keywords
AlGaN GaN; Field effect transistors; MIS heterostructures
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Indexed keywords
ALGAN/GAN;
BI-LAYER;
DC PERFORMANCE;
DEVICE PERFORMANCE;
ESTIMATED LIFETIME;
GATE LEAKAGES;
GATE VOLTAGE SWING;
HETEROSTRUCTURES;
INTERFACIAL LAYER;
MAXIMUM DRAIN CURRENT;
METAL-INSULATOR-SEMICONDUCTORS;
ORDER OF MAGNITUDE;
ROOM TEMPERATURE;
SINGLE LAYER;
SURFACE PASSIVATION;
THERMAL STABILITY;
ALUMINUM;
CRYSTALS;
DRAIN CURRENT;
GALLIUM NITRIDE;
GATE DIELECTRICS;
GATES (TRANSISTOR);
HAFNIUM COMPOUNDS;
HETEROJUNCTIONS;
METAL INSULATOR BOUNDARIES;
MIS DEVICES;
PASSIVATION;
FIELD EFFECT TRANSISTORS;
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EID: 77955781172
PISSN: 18626351
EISSN: 16101642
Source Type: Journal
DOI: 10.1002/pssc.200983452 Document Type: Conference Paper |
Times cited : (6)
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References (9)
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