Grid and substrate bias effects on mechanical properties of diamond films prepared by HFCVD

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 19, Issue SUPPL. 3, 2009, Pages

  Xu, Feng ^a,b   Zuo, Dun Wen ^a   Lu, Wen Zhuang ^a   Zhu, Yong Wei ^a   Wang, Min ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

^b Nanjing Research Institute of Electronics Engineering   (China)

Author keywords

Diamond film; Grid bias; HFCVD; Mechanical properties; Substrate bias

Indexed keywords

CVD DIAMOND; DEFECTS AND IMPURITIES; FRICTION COEFFICIENTS; GRAIN SIZE; GRAIN SIZE EFFECT; GRID BIAS; HARDNESS AND ELASTIC MODULUS; HFCVD; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; LUBRICATING EFFECT; SEM; SUBSTRATE BIAS; SUBSTRATE BIAS EFFECTS;

CHEMICAL VAPOR DEPOSITION; DIAMONDS; FILM PREPARATION; FRACTURE TOUGHNESS; FRICTION; GRAIN SIZE AND SHAPE; MECHANICAL PROPERTIES; SUBSTRATES;

DIAMOND FILMS;

EID: 77955704157     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1003-6326(10)60139-2     Document Type: Article

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