High-speed growth of pentacene thin films by in-line organic vapor phase deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7417, Issue , 2009, Pages

  Rolin, Cédric ^a   Vasseur, Karolien ^a   Steudel, Soeren ^a   Vicca, Peter ^a   Genoe, Jan ^a   Heremans, Paul ^a  

^a IMEC   (Belgium)

Author keywords

Deposition rate; Organic; OVPD; Pentacene; Reel to reel; Roll to roll

Indexed keywords

COATING SPEED; ELECTRICAL QUALITY; HIGH UNIFORMITY; HIGH-SPEED; IN-LINE; INDUSTRIAL PRODUCTION; ORGANIC; ORGANIC VAPOR PHASE DEPOSITION; OVPD; PENTACENE FILM; PENTACENE THIN FILMS; PENTACENES; PROCESSING PARAMETERS; ROLL TO ROLL; SEMI CONDUCTOR; STAGE RING OSCILLATORS; STANDARD DEVIATION; STATIC SYSTEMS; SUPPLY VOLTAGES; TOOL OPERATIONS; TRANSISTOR MOBILITY; WEB SPEED;

DEPOSITION RATES; FIELD EFFECT TRANSISTORS; ORGANIC FIELD EFFECT TRANSISTORS; OSCILLATORS (ELECTRONIC); REELS; SPEED; THIN FILMS; VAPORS;

DEPOSITION;

EID: 77955690405     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.825913     Document Type: Conference Paper

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