The use of the scratch test to measure the fracture strength of brittle thin films

Thin Solid Films

Volumn 518, Issue 17, 2010, Pages 4911-4917

  Borrero López, Oscar ^a,b   Hoffman, Mark ^a   Bendavid, Avi ^c   Martin, Phil J ^c  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b UNIVERSITY OF EXTREMADURA   (Spain)

^c CSIRO   (Australia)

Author keywords

Focused Ion Beam; Fracture; Optical microscopy; Scratch; Thin films

Indexed keywords

CONE CRACK; CRITICAL VALUE; DIAMOND-LIKE CARBON; FILM SURFACES; FRACTURE STRENGTHS; LATERAL FORCE; OPTICAL INSPECTION; SCRATCH; SCRATCH TEST; SIC FILMS; SODA LIME GLASS SUBSTRATE; TIO; WEIBULL ANALYSIS;

AMORPHOUS CARBON; FOCUSED ION BEAMS; OPTICAL DATA STORAGE; OPTICAL INSTRUMENTS; OPTICAL MICROSCOPY; OPTICAL TESTING; RELIABILITY ANALYSIS; SILICON CARBIDE; SUBSTRATES; SURFACE DEFECTS; THIN FILMS; VAPOR DEPOSITION;

BRITTLE FRACTURE;

EID: 77955662120     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.04.015     Document Type: Article

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