Imaging based optofluidic air flow meter with polymer interferometers defined by soft lithography

Optics Express

Volumn 18, Issue 16, 2010, Pages 16561-16566

  Song, Wuzhou ^a   Psaltis, Demetri ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; ATMOSPHERIC PRESSURE; INTERFEROMETERS; MICROFLUIDICS;

AIR FLOW; AIR FLOW-RATE; AIR PRESSURES; DIFFERENTIAL PRESSURES; IN-SITU; INTEGRATED POLYMERS; INTERFERENCE PATTERNS; MICRO-SCALES; MICROFLUIDIC CIRCUIT; ON CHIPS; OPTICAL CAVITIES; SOFT LITHOGRAPHY; VENTURI;

POLYMERS;

POLYMER;

AIR; ARTICLE; FLOWMETER; INSTRUMENTATION; INTERFEROMETRY; METHODOLOGY; MICROFLUIDIC ANALYSIS; MICROFLUIDICS; PRESSURE; PRINTING;

AIR; FLOWMETERS; INTERFEROMETRY; MICROFLUIDIC ANALYTICAL TECHNIQUES; MICROFLUIDICS; POLYMERS; PRESSURE; PRINTING;

EID: 77955642566     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.016561     Document Type: Article

References (18)

1. D. Psaltis, S. R. Quake, and C. Yang, "Developing optofluidic technology through the fusion of microfluidics and optics", Nature 442(7101), 381-386 (2006).
2. C. Monat, P. Domachuk, and D. J. Eggleton, "Integrated optofluidics: a new river of light", Nat. Photonics 1(2), 106-114 (2007).
3. X. Wu, Y. Sun, J. D. Suter, and X. Fan, "Single mode coupled optofluidic ring resonator dye lasers", Appl. Phys. Lett. 94(24), 241109 (2009).
4. F. B. Arango, M. B. Christiansen, M. Gersborg-Hansen, and A. Kristensen, "Optofluidic tuning of photonic crystal band edge lasers", Appl. Phys. Lett. 91(22), 223503 (2007).
5. W. Song, A. E. Vasdekis, Z. Li, and D. Psaltis, "Low-order distributed feedback optofluidic dye laser with reduced threshold", Appl. Phys. Lett. 94(5), 051117 (2009).
6. W. Song, A. E. Vasdekis, Z. Li, and D. Psaltis, "Optofluidic evanescent dye laser based on a distributed feedback circular grating", Appl. Phys. Lett. 94(16), 161110 (2009).
7. C. Karnutsch, C. C. Smith, A. Graham, S. Tomljenovic-Hanic, R. McPhedran, B. J. Eggleton, L. O'Faolain, T. F. Krauss, S. Xiao, and N. A. Mortensen, "Temperature stabilization of optofluidic photonic crystal cavities", Appl. Phys. Lett. 94(23), 231114 (2009).
8. A. Groisman, S. Zamek, K. Campbell, L. Pang, U. Levy, and Y. Fainman, "Optofluidic 1×4 switch", Opt. Express 16(18), 13499-13508 (2008).
9. X. Mao, J. R. Waldeisen, B. K. Juluri, and T. J. Huang, "Hydrodynamically tunable optofluidic cylindrical microlens", Lab Chip 7(10), 1303-1308 (2007).
10. C. Hilty, E. E. McDonnell, J. Granwehr, K. L. Pierce, S. I. Han, and A. Pines, "Microfluidic gas-flow profiling using remote-detection NMR", Proc. Natl. Acad. Sci. U. S. A. 102(42), 14960-14963 (2005).
11. D. S. Chang, S. M. Langelier, and M. A. Burns, "An electronic Venturi-based pressure microregulator", Lab Chip 7(12), 1791-1799 (2007).
12. S. Li, J. C. Day, J. J. Park, C. P. Cadou, and R. Ghodssi, "A fast-response microfluidic gas concentrating device for environmental sensing", Sens. Actuators A Phys. 136(1), 69-79 (2007).
13. M. Yamada, and M. Seki, "Nanoliter-sized liquid dispenser array for multiple biochemical analysis in microfluidic devices", Anal. Chem. 76(4), 895-899 (2004).
14. M. A. Unger, H. P. Chou, T. Thorsen, A. Scherer, and S. R. Quake, "Monolithic microfabricated valves and pumps by multilayer soft lithography", Science 288(5463), 113-116 (2000).
15. W. Song, and D. Psaltis, "Pneumatically tunable optofluidic dye laser", Appl. Phys. Lett. 96(8), 081101 (2010).
16. Y. Xu, C. Chiu, F. Jiang, Q. Lin, and Y. Tai, "A MEMS multi-sensor chip for gas flow sensing", Sens. Actuators A Phys. 121, 253-261 (2005).
17. P. Enoksson, G. Stemme, and E. Stemme, "A silicon resonant sensor structure for Coriolis mass-flow measurements", J. Microelectromech. Syst. 6(2), 119-125 (1997).
18. R. W. Miller, Flow Measurement Engineering Handbook, 3rd ed. (McGraw-Hill, 2006).