Silicon-based inorganic electrets for application in micromachined devices

IEEE Transactions on Dielectrics and Electrical Insulation

Volumn 3, Issue 4, 1996, Pages 494-498

  Amjadi, Houman ^a   Thielemann, Christiane ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC CHARGE; ELECTRIC CURRENTS; ELECTRIC FIELDS; INORGANIC COMPOUNDS; MICROPHONES; MULTILAYERS; SILICA; SILICON NITRIDE; SURFACE PHENOMENA;

CHARGEABILITY; INORGANIC ELECTRETS; LONG TERM CHARGE STABILITY; MICROMACHINED DEVICES; MINIATURIZATION;

ELECTRETS;

EID: 0030217508     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/94.536727     Document Type: Article

References (11)

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