High power electrostatic motor with micropatterned electret on shrouded turbine

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 709-712

  Genda, Takashi ^a   Tanaka, Shuji ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Charge stability; Electret; Gas turbine; Micromotor; Shrouded turbine

Indexed keywords

CHARGE STABILITY; ELECTRET; MICROMOTOR; SHROUDED TURBINE;

ELECTRIC CHARGE; ELECTRIC CONDUCTANCE; GAS TURBINES; MICROELECTROMECHANICAL DEVICES; MOTORS; REACTIVE ION ETCHING; SILICA; STABILITY;

ELECTROSTATIC DEVICES;

EID: 27544454991     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496515     Document Type: Conference Paper

References (6)

1. L. G. Frechette et al., "Demonstration of A Micro-fabricated High-Speed Turbine Supported on Gas Bearings," in Proc. Solid-State Sensor and Actuator Workshop, pp. 43-47, Hilton Head Island, 2000-6
2. T. Genda et al., "High Power Electrostatic Motor and Generator using Electrets," in Proc. The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), pp. 492-495, Boston, 2003-6
3. T. Genda et al., "Design of High Power Electrostatic Motor and Generator Using Electrets," IEEJ Trans. on Sensors and Micromachines, Vol. 123, No. 9, pp. 331-339, 2003, (in Japanese)
4. C. Livermore et al., "A High-Power MEMS Electric Induction Motor," J. Microelectromechanical Systems, Vol. 13, No. 3, pp.465-471, 2004
5. A. Mehra et al., "Combustion Tests in The 6-Wafer Static Structure of A Micro Gas Turbine Engine," in Proc. The 10th International Conference on Solid-State Sensors and Actuators (Transducers '99), pp. 1224-1227, Sendai, 1999-6
6. T. Genda et al., "Micro-Patterned Electret for High Power Electrostatic Motor," in Proc. 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), pp. 470-473, Maastricht, 2004-1