Development of low temperature RF magnetron sputtered ITO films on flexible substrate

Solar Energy Materials and Solar Cells

Volumn 94, Issue 9, 2010, Pages 1448-1450

  Muneshwar, T P ^a   Varma, V ^a   Meshram, N ^a   Soni, S ^a   Dusane, R O ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

Flexible Kapton ; ITO; RF magnetron sputtering; Room temperature

Indexed keywords

DIGITAL DISPLAY; EFFECT OF OXYGEN; ELECTRICAL AND OPTICAL PROPERTIES; FLEXIBLE POLYMERIC SUBSTRATES; FLEXIBLE SUBSTRATE; INDIUM TIN OXIDE; ITO FILMS; LOW TEMPERATURES; NEAR ROOM TEMPERATURE; RF MAGNETRONS; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE; THIN FILM SOLAR CELLS; TRANSPARENT CONDUCTING OXIDE;

ELECTRIC PROPERTIES; INDIUM; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OXYGEN; POLYIMIDES; PRESSURE EFFECTS; STOICHIOMETRY; SUBSTRATES; TIN; TITANIUM COMPOUNDS;

ITO GLASS;

EID: 77955419745     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.03.037     Document Type: Conference Paper

References (10)

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