SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 295, Issue 1-2, 1997, Pages 151-155

Optimization of sputtered ITO films with respect to the oxygen partial pressure and substrate temperature

(3) Carl, K a Schmitt, H a Friedrich, I a

a SAARLAND UNIVERSITY (Germany)

Author keywords

Electrical conductivity; Indium tin_oxide

Indexed keywords

CARRIER CONCENTRATION; CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY OF SOLIDS; LIGHT TRANSMISSION; OXYGEN; PRESSURE EFFECTS; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

INDIUM TIN OXIDE; OXYGEN PARTIAL PRESSURE;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0031072059 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09167-5 Document Type: Article

Times cited : (43)

References (18)

1
- 0039414107
- B. O'Regan and M. Grätzel, Nature, 353 (1991).
- (1991) Nature , vol.353
- O'Regan, B.¹ Grätzel, M.²

2
- 0022075336
- I. Hamberg, C.G. Granqvist, K.-F. Berggren, B.E. Sernelius and L. Engström, Vacuum, 35 (1985) 207.
- (1985) Vacuum , vol.35 , pp. 207
- Hamberg, I.¹ Granqvist, C.G.² Berggren, K.-F.³ Sernelius, B.E.⁴ Engström, L.⁵

3
- 0027577032
- K. Suzuki, N. Hashimoto, T. Oyama, J. Shimizu, Y. Akao and H. Kojima, Thin Solid Films, 226 (1993) 104.
- (1993) Thin Solid Films , vol.226 , pp. 104
- Suzuki, K.¹ Hashimoto, N.² Oyama, T.³ Shimizu, J.⁴ Akao, Y.⁵ Kojima, H.⁶

4
- 0028467714
- K. Ellmer, F. Kudella, R. Mientus, R. Schiek and S. Fiechter, Thin Solid Films, 247 (1994) 15.
- (1994) Thin Solid Films , vol.247 , pp. 15
- Ellmer, K.¹ Kudella, F.² Mientus, R.³ Schiek, R.⁴ Fiechter, S.⁵

5
- 0003696779
- Academic Press, New York
- G. Hass, H. Francombe and W. Hoffmann, Physics of Thin Films, Academic Press, New York, 1977.
- (1977) Physics of Thin Films
- Hass, G.¹ Francombe, H.² Hoffmann, W.³

6
- 0003997703
- Teubner, Stuttgart
- F. Kohlrausch, Praktische Physik, Band 2, Teubner, Stuttgart, 1985.
- (1985) Praktische Physik , vol.2
- Kohlrausch, F.¹

7
- 0028256757
- L. Meng and M.P. dos Santos, Thin Solid Films, 237 (1994) 112.
- (1994) Thin Solid Films , vol.237 , pp. 112
- Meng, L.¹ Dos Santos, M.P.²

8
- 0027658456
- F. Benkhelifa, P.V. Ashrit, G. Bader, F.E. Girouard and Vo-Van Truong, Thin Solid Films, 232 (1993) 83.
- (1993) Thin Solid Films , vol.232 , pp. 83
- Benkhelifa, F.¹ Ashrit, P.V.² Bader, G.³ Girouard, F.E.⁴ Truong, V.-V.⁵

9
- 0027542134
- W.-K. Lee, T. Machine and T. Sugihara, Thin Solid Films, 224 (1993) 105.
- (1993) Thin Solid Films , vol.224 , pp. 105
- Lee, W.-K.¹ Machine, T.² Sugihara, T.³

10
- 0027224790
- T. Karasawa and Y. Miyata, Thin Solid Films, 223 (1993) 135.
- (1993) Thin Solid Films , vol.223 , pp. 135
- Karasawa, T.¹ Miyata, Y.²

11
- 0027641625
- W.-F. Wu and B.-S. Chiou, Appl. Surf. Sci., 68 (1993) 497.
- (1993) Appl. Surf. Sci. , vol.68 , pp. 497
- Wu, W.-F.¹ Chiou, B.-S.²

12
- 0028259383
- Y. Shigesato and D.C. Paine, Thin Solid Films, 238 (1994) 44.
- (1994) Thin Solid Films , vol.238 , pp. 44
- Shigesato, Y.¹ Paine, D.C.²

13
- 0040006281
- Stuttgart
- H. Volz and S. Müller, Internal report of Standard Electric Lorenz AG (SEL), Stuttgart, 1977.
- (1977) Internal Report of Standard Electric Lorenz AG (SEL)
- Volz, H.¹ Müller, S.²

14
- 0040006284
- W. Molzen, J. Vac. Sci. Technol., 2 (1975).
- (1975) J. Vac. Sci. Technol. , vol.2
- Molzen, W.¹

15
- 0039414108
- M. Buchanan, J.B. Webb and D.F. Williams, Appl. Phys. Lett., 37 (1980) 2.
- (1980) Appl. Phys. Lett. , vol.37 , pp. 2
- Buchanan, M.¹ Webb, J.B.² Williams, D.F.³

16
- 0040006280
- D. Bhattacharya, S. Chaudhuri and A.K. Pal, Vacuum, 43 (1992) 373.
- (1992) Vacuum , vol.43 , pp. 373
- Bhattacharya, D.¹ Chaudhuri, S.² Pal, A.K.³

17
- 34247097777
- C.G. Choi, K. No, W.-J. Lee, H.-G. Kim, S.O. Jung, W.J. Lee, W.S. Kim, S.J. Kim and C. Yoon, Thin Solid Films, 258 (1995) 274.
- (1995) Thin Solid Films , vol.258 , pp. 274
- Choi, C.G.¹ No, K.² Lee, W.-J.³ Kim, H.-G.⁴ Jung, S.O.⁵ Lee, W.J.⁶ Kim, W.S.⁷ Kim, S.J.⁸ Yoon, C.⁹

18
- 0029247155
- R.N. Joshi, V.P. Singh, J.C. McClure, Thin Solid Films, 257 (1995) 32.
- (1995) Thin Solid Films , vol.257 , pp. 32
- Joshi, R.N.¹ Singh, V.P.² McClure, J.C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.